Accurate and analytical statistical spatial correlation modeling based on singular value decomposition for VLSI DFM applications

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Volumn 29, Issue 4, 2010, Pages 580-589

  Liu, Jui Hsiang ^a   Tsai, Ming Feng ^b   Chen, Lumdo ^c   Chen, Charlie Chung Ping ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b SpringSoft Inc   (Taiwan)

^c UNITED MICROELECTRONICS CORPORATION   (Taiwan)

Author keywords

Process variation; Spatial correlation; SVD

Indexed keywords

ACCURACY IMPROVEMENT; ANALYTICAL MODEL; DISTANCE-BASED; MEASUREMENT DATA; PROCESS VARIATION; SINGULAR VALUES; SPATIAL CORRELATION MODELS; SPATIAL CORRELATIONS; STATISTICAL TIMING; YIELD ANALYSIS;

CORRELATION METHODS;

SINGULAR VALUE DECOMPOSITION;

EID: 77949908025     PISSN: 02780070     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAD.2010.2042890     Document Type: Article

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