In situ poly heatera reliable tool for performing fast and defined temperature switches on chip

IEEE Transactions on Device and Materials Reliability

Volumn 10, Issue 1, 2010, Pages 3-8

  Aichinger, Thomas ^a,b,c   Nelhiebel, Michael ^b   Einspieler, Sascha ^a,d   Grasser, Tibor ^c  

^a Industrie Elektronik ^*  (Austria)

^b INFINEON TECHNOLOGIES AUSTRIA AG   (Austria)

^c INSTITUTE FOR MICROELECTRONICS   (Austria)

^d CARINTHIA UNIVERSITY OF APPLIED SCIENCES   (Austria)

Author keywords

In situ heating; NBTI; Poly heater; Temperature switches

Indexed keywords

ARBITRARY TEMPERATURE; CALIBRATION PROCEDURE; DEVICE CHARACTERIZATION; DEVICE TEMPERATURE; HEATER TEMPERATURES; IN-SITU; IN-SITU HEATING; MEASUREMENT TECHNIQUES; NBTI; ON CHIPS; OPERATING RANGES; TEMPERATURE GRADIENT; TEMPERATURE RANGE;

CHUCKS; NEGATIVE TEMPERATURE COEFFICIENT; THERMODYNAMIC STABILITY;

HEATING;

EID: 77949386195     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2009.2033467     Document Type: Article

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