Structural effects of nanocomposite films of amorphous carbon and metal deposited by pulsed-DC reactive magnetron sputtering

Diamond and Related Materials

Volumn 16, Issue 10, 2007, Pages 1828-1834

  Corbella, C ^a   Bertran, E ^a   Polo, M C ^a   Pascual, E ^a   Andujar J L ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Diamond like carbon; Metal DLC; Nanostructure; Pulsed DC reactive magnetron sputtering; Stress; Surface properties; Tribology

Indexed keywords

AMORPHOUS CARBON; DEPOSITION; MAGNETRON SPUTTERING; NANOCOMPOSITES; SILICON WAFERS; SURFACE PROPERTIES; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

FILMS STRUCTURE; PULSED-DC REACTIVE MAGNETRON SPUTTERING; SPUTTERED MATERIAL;

DIAMOND LIKE CARBON FILMS;

EID: 35248836501     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.07.012     Document Type: Article

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