Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings

Surface and Coatings Technology

Volumn 127, Issue 2-3, 2000, Pages 223-231

  Bewilogua, K ^a   Cooper, C V ^b   Specht, C ^a   Schroder J ^a   Wittorf, R ^a   Grischke, M ^c  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^b UNITED TECHNOLOGIES RESEARCH CENTER   (United States)

^c Balzers Verschleißschutz   (Liechtenstein)

Author keywords

Adhesion; Diamond like carbon films (DLC); Metal containing DLC; Reactive magnetron sputtering; Substrate heating; Wear

Indexed keywords

ADHESION; FILM GROWTH; FRICTION; HEAT FLUX; HEATING; MAGNETRON SPUTTERING; NIOBIUM; TITANIUM; TUNGSTEN; TUNGSTEN COMPOUNDS; WEAR OF MATERIALS; WEAR RESISTANCE;

DIAMOND LIKE CARBON FILM; FRICTION COEFFICIENT; WEAR RATE;

PROTECTIVE COATINGS;

ABRASIVE WEAR; DEPOSITION; DIAMOND-LIKE COATING; METAL; WEAR RESISTANCE;

EID: 0033924296     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0257-8972(00)00666-6     Document Type: Article

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