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Review of Scientific Instruments

Volumn 81, Issue 2, 2010, Pages

A new flexible scatterometer for critical dimension metrology

(3) Wurm, Matthias a Pilarski, Frank a Bodermann, Bernd a

a PHYSIKALISCH TECHNISCHE BUNDESANSTALT (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AT-WAVELENGTH; CRITICAL DIMENSION METROLOGY; DEEP ULTRAVIOLET; EDGE PROFILE; FUTURE APPLICATIONS; GERMANY; GRATING PERIODS; MEASURAND; MEASUREMENT GEOMETRY; NANOSTRUCTURED SURFACE; NATIONAL METROLOGY INSTITUTES; OPERATION WAVELENGTH; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; REFLECTOMETRY; SCATTEROMETERS; SCATTEROMETRY;

ELLIPSOMETRY; MEASUREMENT THEORY;

METEOROLOGICAL INSTRUMENTS;

EID: 77949277204 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3280160 Document Type: Conference Paper

Times cited : (44)

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