Optimal sets of measurement data for profile reconstruction in scatterometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6617, Issue , 2007, Pages

  Gross, H ^a   Rathsfeld, A ^b   Scholze, F ^a   Bar M ^a   Dersch, U ^c  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b WEIERSTRASS INSTITUTE FOR APPLIED ANALYSIS AND STOCHASTICS   (Germany)

^c Advanced Mask Technology Center   (Germany)

Author keywords

Diffraction gratings; Inverse problem; Sensitivity analysis

Indexed keywords

PERIODIC SURFACE STRUCTURES; PROFILE RECONSTRUCTION; SCATTEROMETRY;

DIFFRACTION GRATINGS; IMAGE RECONSTRUCTION; INVERSE PROBLEMS; ITERATIVE METHODS; NUMERICAL METHODS; SENSITIVITY ANALYSIS;

ALGORITHMS;

EID: 36248937245     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726070     Document Type: Conference Paper

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