Nanogap-assisted surface plasmon nanolithography

Journal of Physical Chemistry Letters

Volumn 1, Issue 3, 2010, Pages 657-662

  Ueno, Kosei ^a,b   Takabatake, Satoaki ^a   Nishijima, Yoshiaki ^a   Mizeikis, Vygantas ^c   Yokota, Yukie ^a   Misawa, Hiroaki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Nanoparticles and nanostructures

Indexed keywords

FURTHER DEVELOPMENT; GLASS SUBSTRATES; INCIDENT LIGHT; LIFTOFF TECHNIQUE; LOCALIZED FIELD; LOCALIZED SURFACE PLASMON; METALLIC STRUCTURES; MONODISPERSE; NANO-GAP; NANOBLOCKS; NANOGAPS; NANOMETRICS; NOBLE METALS; PROOF OF PRINCIPLES; STRONG ENHANCEMENT; SUB-WAVELENGTH; SURFACE PLASMONS;

ELECTROMAGNETIC FIELD MEASUREMENT; ELECTROMAGNETIC FIELDS; ELECTRON BEAMS; GLASS; NANOLITHOGRAPHY; OPTICAL DATA STORAGE; PLASMONS; PRECIOUS METALS; SUBSTRATES;

NANOPARTICLES;

EID: 77749234126     PISSN: None     EISSN: 19487185     Source Type: Journal    
DOI: 10.1021/jz9002923     Document Type: Article

References (33)

1. Ito, T.; Yamada, T.; Inao, Y.; Yamaguchi, T.; Mizutani, N.; Kuroda, R. Fabrication of Half-Pitch 32 nm Resist Patterns Using near-Field Lithography with a-Si Mask. Appl. Phys. lett. 2006, 89, 033113/1-033113/3.
2. Inao, Y.; Nakasato, S.; Kuroda, R.; Ohtsu, M. near-Field Lithography As Prototype Nano-Fabrication Tool. Microelectron. Eng. 2007, 84, 705-710.
3. Kawazoe, T.; Takahashi, T.; Ohtsu, M. Evaluation of the Dynamic Range and Spatial Resolution of Nonadiabatic Optical near-Field Lithography through Fabrication of Fresnel Zone Plates. Appl. Phys. B 2010, 98, 5-11.
4. Barnes, W. L.; Dereux, A.; Ebbsen, T. W. Surface Plasmon Subwavelength Optics. Nature 2003, 424, 824-830.
5. Krenn, J. R. Nanoparticle Waveguides - Watching Energy Transfer. Nat. Mater. 2003, 2, 210-211.
6. Maier, S. A.; Kik, P. G.; Atwater, H. A.; Meltzer, S.; Harel, E.; Koel, B. E.; Requicha, A. A. G. Local Detection of Electromagnetic Energy Transport below the Diffraction Limit in Metal Nanoparticle Plasmon Waveguides. Nat. Mater. 2003, 2, 229-232.
7. Martin, O. J. F. Surface Plasmon Illumination Scheme for Contact Lithography beyond the Diffraction Limit. Microelectron. Eng. 2003, 67-68, 24-30.
8. Srituravanich, W.; Fang, N.; Sun, C.; Luo, Q.; Zhang, X. Plasmonic Nanolithography. Nano Lett. 2004, 4, 1085-1088.
9. Srituravanich, W.; Durant, S.; Lee, H.; Sun, C.; Zhanga, X. Deep Subwavelength Nanolithography Using Localized Surface Plasmon Modes on Planar Silver Mask. J. Vac. Sci. Technol., B 2005, 23, 2636-2639.
10. Shao, D. B.; Chen, S. C. Surface-Plasmon-Assisted Nanoscale Photolithography by Polarized Light. Appl. Phys. Lett. 2005, 86, 253107/1-253107/3.
11. Wang, L.; Uppuluri, S. M.; Jin, E. X.; Xu, X. Nanolithography Using High Transmission Nanoscale Bowtie Apertures. Nano Lett. 2006, 6, 361-364.
12. Shao, D. B.; Chen, S. C. Direct Patterning of Three-Dimensional Periodic Nanostructures by Surface-Plasmon-Assisted Nanolithography. Nano Lett. 2006, 6, 2279-2283.
13. Wei, X.; Luo, X.; Dong, X.; Du, C. Localized Surface Plasmon Nanolithography with Ultrahigh Resolution. Opt. Express 2007, 15, 14177-14183.
14. Koenderink, A. F.; Hernández, J. V.; Robicheaux, F.; Noordam, L. D.; Polman, A. Programmable Nanolithography with Plasmon Nanoparticle Arrays. Nano Lett. 2007, 7, 745-749.
15. Stockman, M. I. Nanofocusing of Optical Energy in Tapered Plasmonic Waveguides. Phys. Rev. Lett. 2004, 93, 137404/1-137404/4.
16. Luo, X.; Ishihara, T. Surface Plasmon Resonant Interference Nanolithography Technique. Appl. Phys. Lett. 2004, 84, 4780-4782.
17. Zhao-Wei Liu, Z.-W.; Wei, Q.-H.; Zhang, X. Surface Plasmon Interference Nanolithography. Nano Lett. 2005, 5, 957-961.
18. Ropers, C.; Neacsu, C. C.; Elsaesser, T.; Albrecht, M.; Raschke, M. B.; Lienaul, C. Grating-Coupling of Surface Plasmons onto Metallic Tips: A Nanoconfined Light Source. Nano Lett. 2007, 7, 2784-2788.
19. Huang, W.; Qian, W.; El-Sayed, M. A. Photothermal Reshaping of Prismatic Au Nanoparticles in Periodic Monolayer Arrays by Femtosecond Laser Pulses. J. Appl. Phys. 2005, 98, 114301/1-114301/8.
20. Xu, H.; Aizpurua, J.; Käll, M.; Apell, P. Electromagnetic Contributions to Single-Molecule Sensitivity in Surface-Enhanced Raman Scattering. Phys. Rev. E 2000, 62, 4318-4324.
21. Hao, E.; Schatza, G. C. Electromagnetic Fields around Silver Nanoparticles and Dimmers. J. Chem. Phys. 2004, 120, 357-366.
22. Ueno, K.; Juodkazis, S.; Shibuya, T.; Yokota, Y.; Mizeikis, V.; Sasaki, K.; Misawa, H. Nanoparticle Plasmon-Assisted Two-Photon Polymerization Induced by Incoherent Excitation Source. J. Am. Chem. Soc. 2008, 130, 6928-6929.
23. Ueno, K.; Juodkazis, S.; Mizeikis, V.; Sasaki, K.; Misawa, H. Spectrally-Resolved Atomic-Scale Length Variations of Gold Nanorods. J. Am. Chem. Soc. 2006, 128, 14226-14227.
24. Ueno, K.; Juodkazis, S.; Mizeikis, V.; Sasaki, K.; Misawa, H. Clusters of Closely-Spaced Gold Nanoparticles As a Source of Two-Photon Photoluminescence at VisibleWavelengths. Adv. Mater. 2008, 20, 26-30.
25. Murazawa, N.; Ueno, K.; Mizeikis, V.; Juodkazis, S.; Misawa, H. Spatially Selective Nonlinear Photopolymerization Induced by the Near-Field of Surface Plasmons Localized on Rectangular Gold Nanorods. J. Phys. Chem. C 2009, 113, 1147-1149.
26. Ueno, K.; Juodkazis, S.; Shibuya, T.; Mizeikis, V.; Yokota, Y.; Misawa, H. Nanoparticle-Enhanced Photopolymerization. J. Phys. Chem. C 2009, 113, 11720-11724.
27. NANO SU-8, Negative Tone Photoresist Formulations 2-25. http://www.microchem.com/products/pdf/SU8-2-25.pdf (2002).
28. Hubert, C.; Rumyantseva, A.; Lerondel, G.; Grand, J.; Kostcheev, S.; Billot, L.; Vial, A.; Bachelot, R.; Royer, P.; Chang, S. H.; Gray, S. K.; Wiederrecht, G. P.; Schatz, G. C. Near-Field Photochemical Imaging of Noble Metal Nanostructures. Nano Lett. 2005, 5, 615-619.
29. Sundaramurthy, A.; Schuck, P. J.; Conley, N. R.; Fromm, D. P.; Kino, G. S.; Moerner, W. E. Toward Nanometer-Scale Optical Photolithography: Utilizing the Near-Field of Bowtie Optical Nanoantennas. Nano Lett. 2006, 6, 355-360.
30. El Ahrach, H. Ibn; Bachelot, R.; Vial, A.; Lerondel, G.; Plain, J.; Royer, P.; Soppera, O. Spectral Degeneracy Breaking of the Plasmon Resonance of Single Metal Nanoparticles by Nanoscale Near-Field Photopolymerization. Phys. Rev. Lett. 2007, 98, 107402/1-107402/4.
31. Mohamed, M. B.; Ismail, K. Z.; Link, S.; El-Sayed, M. A. Thermal Reshaping of Gold Nanorods in Micelles. J. Phys. Chem. B 1998, 102, 9370-9374.
32. Magnusson, M. H.; Deppert, K.; Malm, J.-O.; Bovin, J.-O.; Samuelson, L. Gold Nanoparticles: Production, Reshaping, and Thermal Charging. J. Nanopart. Res. 1999, 2, 243-251.
33. Liu, Y.; Mills, E. N.; Composto, R. J. Tuning Optical Properties of Gold Nanorods in Polymer Films through Thermal Reshaping. J. Mater. Chem. 2009, 19, 2704-2709.