Surface-plasmon-assisted nanoscale photolithography by polarized light

Applied Physics Letters

Volumn 86, Issue 25, 2005, Pages 1-3

  Shao, D B ^a   Chen, S C ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FUNCTIONS; FINITE-DIFFERENCE TIME-DOMAIN; NANOSCALE PHOTOLITHOGRAPHY; SURFACE PLASMONS;

COMPUTER SIMULATION; ELECTROMAGNETISM; ELECTRON BEAM LITHOGRAPHY; EVAPORATION; LASER BEAMS; LIGHT POLARIZATION; PHOTORESISTS; SURFACE PLASMON RESONANCE;

PHOTOLITHOGRAPHY;

EID: 24344463105     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1951052     Document Type: Article

References (14)

1. S. Okazaki, J. Vac. Sci. Technol. B 9, 2829 (1991).
2. H. Schmid, H. Biebuyck, B. Michel, and O. J. F. Martin, Appl. Phys. Lett. 72, 2379 (1998).
3. R. Kunz, M. Rothschild, and M. S. Yeung, J. Vac. Sci. Technol. B 21, 78 (2003).
4. J. G. Goodberlet and H. Kavak, Appl. Phys. Lett. 81, 1315 (2002).
5. T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, Nature (London) 391, 667 (1999).
6. L. Salomon, F. Grillot, A. V. Zayats, and F. de Fornel, Phys. Rev. Lett. 86, 1110 (2001).
7. D. E. Grupp, H. J. Lezec, T. W. Ebbesen, K. M. Pellerin, and T. Thio, Appl. Phys. Lett. 77, 1569 (2000).
8. W. Srituravanich, N. Fang, C. Sun, Q. Luo, and X. Zhang, Nano Lett. 4, 1085 (2004).
9. X. Luo and T. Ishihara, Appl. Phys. Lett. 84, 4780 (2004).
10. J. Pendry, Science 285, 1687 (2002).
11. E. Popov, M. Nevière, S. Enoch, and R. Reinisch, Phys. Rev. B 62, 16100 (2000).
12. E. D. Palik, Handbook of Optical Constants of Solids (Academic, Orlando, FL, 1985).
13. S. K. Gray and T. Kupka, Phys. Rev. B 68, 045415 (2003).
14. P. W. Barber and S. C. Hill, Light Scattering by Particles: Computational Methods (World Scientific, Singapore, 1990).