Nanolithography using high transmission nanoscale bowtie apertures

Nano Letters

Volumn 6, Issue 3, 2006, Pages 361-364

  Wang, Liang ^a   Uppuluri, Sreemanth M ^a   Jin, Eric X ^a   Xu, Xianfan ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOWTIE APERTURES; FINITE DIFFERENT TIME DOMAIN SIMULATIONS; LASER BEAM POLARIZATION;

FINITE DIFFERENCE METHOD; LASER BEAM EFFECTS; LITHOGRAPHY; PHOTORESISTS; THIN FILMS;

NANOSTRUCTURED MATERIALS;

EID: 33645379682     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl052371p     Document Type: Conference Paper

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