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Applied Physics Letters

Volumn 84, Issue 23, 2004, Pages 4780-4782

Surface plasmon resonant interference nanolithography technique

(2) Luo, Xiangang a Ishihara, Teruya a

a Japan Science and Technology Agency (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; COMPUTER SIMULATION; DATA REDUCTION; LIGHT INTERFERENCE; LIGHT TRANSMISSION; LIGHTING; MASKS; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SILICON; SURFACE PLASMON RESONANCE; SURFACE WAVES;

METALLIC SURFACES; NANOIMPRINT; SURFACE PLASMON POLARITONS (SPP); SURFACE PLASMONS (SP);

NANOTECHNOLOGY;

EID: 3042644555 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1760221 Document Type: Article

Times cited : (578)

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