Direct patterning of three-dimensional periodic nanostructures by surface-plasmon-assisted nanolithography

Nano Letters

Volumn 6, Issue 10, 2006, Pages 2278-2283

  Shao, D B ^a   Chen, S C ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN FLEXIBILITY; POLYMERIC NANOSTRUCTURES; SURFACE PLASMONS; DIRECT-PATTERNING; DIRECT-WRITING; FABRICATION TECHNIQUE; FUNCTIONAL NANOSTRUCTURES; INTERFERENCE PATTERNS; NANOFABRICATION TECHNIQUES; OPTICAL NEAR FIELD; PERIODIC NANOSTRUCTURE; SURFACE-PLASMON-ASSISTED NANOLITHOGRAPHY; TECHNICAL APPLICATIONS; THREE-DIMENSIONAL (3D) NANOSTRUCTURES;

FABRICATION; MASKS; PHOTOLITHOGRAPHY; PHOTONS; SIGNAL PROCESSING; NANOLITHOGRAPHY; NANOSTRUCTURES; PLASMONS;

NANOSTRUCTURED MATERIALS; THREE DIMENSIONAL;

NANOMATERIAL;

ARTICLE; CHEMISTRY; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PERIODICITY; PHOTOGRAPHY; SURFACE PLASMON RESONANCE; SURFACE PROPERTY; THREE DIMENSIONAL IMAGING; ULTRASTRUCTURE;

IMAGING, THREE-DIMENSIONAL; MATERIALS TESTING; NANOSTRUCTURES; NANOTECHNOLOGY; PERIODICITY; PHOTOGRAPHY; SURFACE PLASMON RESONANCE; SURFACE PROPERTIES;

EID: 84860016792     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl061712b     Document Type: Article

References (22)

1. John, S. Phys. Rev. Lett. 1987, 58, 2486-2489.
2. Yablonovitch, E. Phys. Rev. Lett. 1987, 58, 2059-2062.
3. Yen, T. J.; Padilla, W. J.; Fang, N.; Vier, D. C.; Smith, D. R.; Pendry, J. B.; Basov, D. N.; Zhang, X. Science 2004, 303, 1494-1496.
4. Smith, D. R.; Pendry, J. B.; Wiltshire, M. C. K. Science 2004, 305, 788-792.
5. Cubukcu, E.; Aydin, K.; Ozbay, E.; Foteinopoulou, S.; Soukoulis, C. M. Nature 2003, 423, 604-605.
6. Parimi, P. V.; Lu, W. T. T.: Vodo, P.; Sridhar, S. Nature 2003, 426, 404-404.
7. Shalaev, V. M.; Cai, W. S.; Chettiar, U. K.; Yuan, H. K.; Sarychev, A. K.; Drachev, V. P.; Kildishev, A. V. Opt. Lett. 2005, 30, 3356-3358.
8. Lin, S. Y.; Fleming, J. G.; Hetherington, D. L.; Smith, B. K.; Biswas, R.; Ho, K. M.; Sigalas, M. M.; Zubrzycki, W.; Kurtz, S. R.; Bur, J. Nature 1998, 394, 251-253.
9. Qi, M. H.; Lidorikis, E.; Rakich, P. T.; Johnson, S. G.; Joannopoulos, J. D.; Ippen, E. P.; Smith, H. I. Nature 2004, 429, 538-542.
10. Blanco, A.; Chomski, E.; Grabtchak, S.; Ibisate, M.; John, S.; Leonard, S. W.; Lopez, C.; Meseguer, F.; Miguez, H.; Mondia, J. P.; Ozin, G. A.; Toader, O.; van Driel, H. M. Nature 2000, 405, 437-440.
11. Campbell, M.; Sharp, D. N.; Harrison, M. T.; Denning, R. G.; Turberfield, A. J. Nature 2000, 404, 53-56.
12. Deubel, M.; Von Freymann, G.; Wegener, M.; Pereira, S.; Busch, K.; Soukoulis, C. M. Nat. Mater. 2004, 3, 444-447.
13. Jeon, S.; Park, J. U.; Cirelli, R.; Yang, S.; Heitzman, C. E.; Braun, P. V.; Kenis, P. J. A.; Rogers, J. A. Proc. Natl. Acad. Sci. U.S.A. 2004, 101, 12428-12433.
14. Ebbesen, T. W.; Lezec, H. J.; Ghaemi, H. F.; Thio, T.; Wolff, P. A. Nature 1998, 391, 667-669.
15. Barnes, W. L.; Dereux, A.; Ebbesen, T. W. Nature 2003, 424, 824-830.
16. Luo, X. G.; Ishihara, T. Appl. Phys. Lett. 2004, 84, 4780-4782.
17. Srituravanich, W.; Fang, N.; Sun, C.; Luo, Q.; Zhang, X. Nano. Lett. 2004, 4, 1085-1088.
18. Shao, D. B.; Chen, S. C. Appl. Phys. Lett. 2005, 86, 253107.
19. Raether, H. Surface Plasmons on Smooth and Rough Surfaces and on Gratings; Springer-Verlag: New York, 1987.
20. Collin, S.; Pardo, F.; Teissier, R.; Pelouard, J. L. J. Opt. A: Pure. Appl. Opt. 2002, 4, S154-S160.
21. Madou, M. J. Fundamentals of Microfabrication: The Science of Miniaturization; CRC Press: Boca Raton, FL, 2002.
22. Palik, E. D.; Ghosh, G. Handbook of Optical Constants of Solids; Academic Press: San Diego, CA, 1998.