Nanopatterning by an integrated process combining capillary force lithography and microcontact printing

Advanced Functional Materials

Volumn 20, Issue 4, 2010, Pages 663-668

  Duan, Xuexin ^a   Zhao, Yiping ^a   Perl, Andrés ^a   Berenschot, Erwin ^a   Reinhoudt, David N ^a   Huskens, Jurriaan ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FORCE LITHOGRAPHY; CHEMICAL FUNCTIONALIZATION; CHEMICAL PATTERN; GASPHASE; GOLD PATTERN; GOLD SUBSTRATES; INTEGRATED PROCESS; MICRO CONTACT PRINTING; NANOPATTERNING; PDMS SUBSTRATE; POLYDIMETHYLSILOXANE PDMS; POLYMER PATTERNS; THIN POLYMER FILMS;

ELECTRON DEVICE MANUFACTURE; MICROCHANNELS; POLYMER FILMS; PRINTING;

SILICONES;

EID: 77249137752     PISSN: 1616301X     EISSN: 16163028     Source Type: Journal    
DOI: 10.1002/adfm.200901700     Document Type: Article

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