Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology

Microsystem Technologies

Volumn 15, Issue 12, 2009, Pages 1885-1896

  Cui, Feng ^a   Chen, Wenyuan ^a   Zhang, Weiping ^a   Xiao, Qijun ^a   Ma, Gaoyin ^a   Liu, Wu ^a  

^a Shanghai Jiao Tong University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICALLY SUSPENDED GYROSCOPE; ETCHING MASKS; FABRICATION PROCESS; KEY TECHNIQUES; MICRO DEVICES; MICRO-FABRICATION TECHNOLOGY; MICRO-GYROSCOPE; MICROMACHINED; OPERATING PRINCIPLES; PYREX GLASS; SMALL GAPS; UV LIGA; UV-LIGA TECHNOLOGY;

ASPECT RATIO; ETCHING; GYROSCOPES; METAL RECOVERY; MOLDS; NICKEL ALLOYS; SOLDERING; STATORS; SULFURIC ACID;

FABRICATION;

EID: 76449119592     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0924-0     Document Type: Article

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