The evaporated metal masks for chemical glass etching for BioMEMS

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 135-140

  Mourzina, Y ^a   Steffen, A ^a   Offenhausser A ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; DEPOSITION; ETCHING; EVAPORATION; GLASS; MASKS; MICROSTRUCTURE; THIN FILMS;

BIOMEMS; GLASS WAFERS; MICROCHANNELS; PYREX GLASS;

MICROELECTROMECHANICAL DEVICES;

EID: 24044550345     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0430-3     Document Type: Article

References (13)

1. Cheng J; Kricka LJ (2001) Biochip technology. Harwood Academica Publishers, Bridgeport, NJ
2. Terry SH; Jerman JH; Angell JB (1979) A gas Chromatographic air analyzer fabricated on a silicon wafer. EEE Trans Electron Devices 26: 880-886
3. Manz A; Miyahara Y; Miura J; Watanabe Y; Miyagi H; Sato K (1990) Design of an open-tubular column liquid Chromatograph using silicon chip technology. Sens Actuators B1: 249-255
4. Manz A; Harrison DJ; Verpoorte EMJ; Fettinger JC; Paulus A; Ludi Hi Widmer HM (1992) Planar chip technology for miniaturization and integration of separation techniques into monitoring systems - Capillary electrophoresis on a chip. J Chromatogr 593: 253-258
5. Harrison DJ; Fluri K; Seiler K; Fan Z; Effenhausser CS; Manz A (1993) Micromachining a miniaturized capillary electrophoresis-based chemical analysis system on a chip. Sci 261: 895-897
6. Pollack L; Tate MW; Finnefrock AC et al (2001) Time resolved collapse of a folding protein observed with small angle X-ray scattering. Phys Rev Lett 86: 4962-4965
7. Perkins TT; Smith DE; Chu S (1997) Single polymer dynamics in an sudden elongation flow. Sci 276: 2016-2021
8. Lichtenberg J; Verpoorte E; de Rooij NF (2001) Sample preconcentration by field amplification stacking for microchip-based capillary electrophoresis. Electrophoresis 22: 258-271
9. Zhang J; Tan KL; Gong HQ (2001) Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS). Polym Test 20: 693-701
10. Bischof B (1976) Ausgewählte Verfahren zum Ätzen, chemischen und elektrochemischen Polieren von Metallen und Legierungen., Institute for Solid State Research, Research Centre Jülich
11. Fan ZH; Harrison DJ (1994) Micromachining of capillary electrophoresis injectors and separators on glass chips and evaluation of flow at capillary interface. Anal Chem 66: 177-184
12. Rocklin RD; Ramsey RS; Ramsey M (2000) A microfabricated fluidic device for performing two-dimensional liquid-phase separations. Anal Chem 72: 5244-5249
13. Madou M (1997) Fundamentals of microfabrication, CRC Press, Boca Raton, Florida