Determination of the pull-off forces and pull-off dynamics of an electrostatically actuated silicon disk

Journal of Microelectromechanical Systems

Volumn 17, Issue 3, 2008, Pages 643-652

  Bachmann, Daniel ^a   Hierold, Christofer ^b  

^a Wärtsilä Switzerland Ltd   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

Electrodes; Electrostatics; Flywheel gyroscope; Flywheels; Force; Gyroscopes; Laser Doppler vibrometry; Pull off force; Silicon; Springs; Van der Waals

Indexed keywords

ADHESION; ARCHITECTURAL DESIGN; DISKS (STRUCTURAL COMPONENTS); ELECTRODES; ELECTROSTATIC ACTUATORS; FLYWHEELS; GYROSCOPES; MANGANESE; MANGANESE COMPOUNDS; METALLIZING; NONMETALS; PHOTORESISTS; SILICON; SURFACES; TESTING; WHEELS;

'PULL OFF' FORCE; (+ MOD 2N) OPERATION; (100) SILICON; ADHESION ENERGIES; ADHESION FORCES; BOTTOM ELECTRODES; CIRCULAR DISKS; CONTACT AREAS; ELECTROSTATIC FIELDS; EXPERIMENTAL DETERMINATION; LATERAL MOVEMENT; MECHANICAL SENSITIVITY; MICROMACHINED; PROOF MASS; START UPS; TEST DEVICES; TEST STRUCTURES; TEXTURED SURFACES; YAW RATE SENSORS;

ELECTRIC ENERGY STORAGE;

EID: 45449113770     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.918396     Document Type: Article

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