Modelling of an accelerometer based on a levitated proof mass

Journal of Micromechanics and Microengineering

Volumn 12, Issue 4, 2002, Pages 495-503

  Houlihan, R ^a   Kraft, M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTROSTATICS; FINITE ELEMENT METHOD; FORCE CONTROL; FORCE MEASUREMENT; INTEGRAL EQUATIONS; MATHEMATICAL MODELS; OPTIMIZATION;

DISC DYNAMICS; DISC ORIENTATION; ELECTROMECHANICAL MODULATOR; ELECTROSTATIC FORCE; FORCE BALANCE; LEVITATED DISC; PROOF MASS; PROPORTIONAL DERIVATIVE CONTROL;

ACCELEROMETERS;

EID: 0036646694     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/4/325     Document Type: Article

References (10)

1. A differential capacitive low-g microaccelerometer with mg resolution
2. Open-loop operating mode of micromachined capacitive accelerometer
3. Electrostatic levitator for hard disk media
4. Experimental study of electric suspension for microbearings
5. Capacitive detection scheme for space accelerometers application
6. Electrostatically levitated micro motor for inertia measurement system
7. MEMS devices fabricated on spherical silicon
8. Closed loop digital accelerometer employing oversampling conversion
9. Electrostatic force analysis of electrostatic levitation system
10. Electrostatic comb drive for resonant sensor and actuator applications