Toward atomic-scale device fabrication in silicon using scanning probe microscopy

Nano Letters

Volumn 4, Issue 10, 2004, Pages 1969-1973

  Ruess, Frank J ^a   Oberbeck, Lars ^a   Simmons, Michelle Y ^a   Goh, Kuan Eng J ^a   Hamilton, Alex R ^a   Hallam, Toby ^a   Schofield, Steven R ^a   Curson, Neil J ^a   Clark, Robert G ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

NANOTECHNOLOGY; PHOSPHORUS; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY; ULTRAHIGH VACUUM;

ATOMIC-SCALE DEVICES; ELECTRON PROPAGATION; PHOSPHORUS-DOPED DEVICES; QUANTUM CONFINEMENT;

SILICON;

PHOSPHORUS; SILICON;

ARTICLE; DEVICE; ELECTRON; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; VACUUM;

EID: 7544248820     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl048808v     Document Type: Article

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