Membrane folding by ion implantation induced stress to fabricate three-dimensional nanostructures

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1454-1458

  Arora, William J ^a   Smith, Henry I ^a   Barbastathis, George ^b  

^a USA   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Ion implantation; Membrane folding; Three dimensional structures

Indexed keywords

CANTILEVER BEAMS; COMPUTER SIMULATION; ION IMPLANTATION; MICROSTRUCTURE; MONTE CARLO METHODS; NANOSTRUCTURES;

MEMBRANE FOLDING; SELECTIVE ETCHING; THREE-DIMENSIONAL STRUCTURES;

SILICON NITRIDE;

EID: 34247554274     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.182     Document Type: Article

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