Membrane folding by helium ion implantation for three-dimensional device fabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2184-2187

  Arora, William J ^a   Sijbrandij, Sybren ^b   Stern, Lewis ^b   Notte, John ^b   Smith, Henry I ^a   Barbastathis, George ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Carl Zeiss Vision Inc USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMPLANT ENERGY; MEMBRANE FOLDING;

COMPOSITE MEMBRANES; ION IMPLANTATION; MICROFABRICATION; SILICON NITRIDE; THREE DIMENSIONAL;

HELIUM;

EID: 37149021346     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2779049     Document Type: Article

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