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Journal of Applied Physics

Volumn 106, Issue 11, 2009, Pages

Effect of misfit strain and surface roughness on the tunable dielectric behavior of Ba0.5Sr0.5TiO3 thin films

(3) Saravanan, K Venkata a Krishna, M Ghanashyam a Raju, K C James a

a UNIVERSITY OF HYDERABAD (India)

Author keywords

[No Author keywords available]

Indexed keywords

BST FILM; CRYSTALLINITIES; CRYSTALLOGRAPHIC TEXTURES; DIELECTRIC CONSTANTS; FIELD STRENGTHS; MICROSTRUCTURAL VARIATION; MISFIT STRAINS; PEAK VALUES; PROCESSING CONDITION; PT UNDERLAYERS; RF-MAGNETRON SPUTTERING; ROOT MEAN SQUARE ROUGHNESS; SI (100) SUBSTRATE; SUBSTRATE TEMPERATURE; TEMPERATURE RANGE; TIO; TUNABILITIES; TUNABLE DIELECTRICS;

BARIUM; MAGNETRON SPUTTERING; MORPHOLOGY; PLATINUM; SILICON COMPOUNDS; SUBSTRATES; SURFACE ROUGHNESS;

THERMAL EFFECTS;

EID: 72449204159 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3256160 Document Type: Article

Times cited : (17)

References (41)

1
- 0035878683
- Sol-gel derived grain oriented barium strontium titanate thin films for phase shifter applications
- DOI 10.1063/1.1378811
- S. B. Majumder, M. Jain, A. Martinez, R. S. Katiyar, F. W. Van Keuls, and F. A. Miranda, J. Appl. Phys. 0021-8979 90, 896 (2001). 10.1063/1.1378811 (Pubitemid 33665820)
- (2001) Journal of Applied Physics , vol.90 , Issue.2 , pp. 896-903
- Majumder, S.B.¹ Jain, M.² Martinez, A.³ Katiyar, R.S.⁴ Van Keuls, F.W.⁵ Miranda, F.A.⁶

2
- 0033524312
- 0895-2477,. 10.1002/(SICI)1098-2760(19990105)20:1<53::AID-MOP15>3. 0.CO;2-L
- F. W. Van Keuls, R. R. Romanofsky, N. D. Varaljay, F. A. Miranda, C. L. Canedy, S. Aggarwal, T. Venkatesan, and R. Ramesh, Microwave Opt. Technol. Lett. 0895-2477 20, 53 (1999). 10.1002/(SICI)1098-2760(19990105)20:1<53::AID- MOP15>3.0.CO;2-L
- (1999) Microwave Opt. Technol. Lett. , vol.20 , pp. 53
- Van Keuls, F.W.¹ Romanofsky, R.R.² Varaljay, N.D.³ Miranda, F.A.⁴ Canedy, C.L.⁵ Aggarwal, S.⁶ Venkatesan, T.⁷ Ramesh, R.⁸

3
- 0036572616
- 3 thin film
- DOI 10.1063/1.1466526
- F. M. Pontes, E. R. Leite, D. S. L. Pontes, E. Longo, E. M. S. Santos, S. Mergulhao, P. S. Pizani, F. Lanciotti, Jr., T. M. Boschi, and J. A. Varela, J. Appl. Phys. 0021-8979 91, 5972 (2002). 10.1063/1.1466526 (Pubitemid 34562258)
- (2002) Journal of Applied Physics , vol.91 , Issue.9 , pp. 5972
- Pontes, F.M.¹ Leite, E.R.² Pontes, D.S.L.³ Longo, E.⁴ Santos, E.M.S.⁵ Mergulhao, S.⁶ Pizani, P.S.⁷ Lanciotti Jr., F.⁸ Boschi, T.M.⁹ Varela, J.A.¹⁰

4
- 0000472778
- 0003-6951,. 10.1063/1.126212
- C. M. Carlson, T. V. Rivkin, P. A. Parilla, J. D. Perkins, D. S. Ginley, A. B. Kozyrev, V. N. Oshadchy, and A. S. Pavlov, Appl. Phys. Lett. 0003-6951 76, 1920 (2000). 10.1063/1.126212
- (2000) Appl. Phys. Lett. , vol.76 , pp. 1920
- Carlson, C.M.¹ Rivkin, T.V.² Parilla, P.A.³ Perkins, J.D.⁴ Ginley, D.S.⁵ Kozyrev, A.B.⁶ Oshadchy, V.N.⁷ Pavlov, A.S.⁸

5
- 18044402505
- 3 thin film on MgO for room temperature microwave phase shifters
- DOI 10.1063/1.1343499
- C. L. Chen, J. Shen, S. Y. Chen, G. P. Luo, C. W. Chu, F. A. Miranda, F. W. Van Keuls, J. C. Jiang, E. I. Meletis, and H. Y. Chang, Appl. Phys. Lett. 0003-6951 78, 652 (2001). 10.1063/1.1343499 (Pubitemid 33661954)
- (2001) Applied Physics Letters , vol.78 , Issue.5 , pp. 652-654
- Chen, C.L.¹ Shen, J.² Chen, S.Y.³ Luo, G.P.⁴ Chu, C.W.⁵ Miranda, F.A.⁶ Van Keuls, F.W.⁷ Jiang, J.C.⁸ Meletis, E.I.⁹ Chang, H.Y.¹⁰

6
- 0036647978
- 3 thin films
- DOI 10.1109/LMWC.2002.801129, PII 1011092002801129
- B. Acikel, T. R. Taylor, P. J. Hansen, J. S. Speck, and R. A. York, IEEE Microw. Wirel. Compon. Lett. 1531-1309 12, 237 (2002). 10.1109/LMWC.2002.801129 (Pubitemid 34861790)
- (2002) IEEE Microwave and Wireless Components Letters , vol.12 , Issue.7 , pp. 237-239
- Acikel, B.¹ Taylor, T.R.² Hansen, P.J.³ Speck, J.S.⁴ York, R.A.⁵

7
- 0038311903
- 0021-8979,. 10.1063/1.1569392
- M. W. Cole, W. D. Nothwang, C. Hubbard, E. Ngo, and M. Ervin, J. Appl. Phys. 0021-8979 93, 9218 (2003). 10.1063/1.1569392
- (2003) J. Appl. Phys. , vol.93 , pp. 9218
- Cole, M.W.¹ Nothwang, W.D.² Hubbard, C.³ Ngo, E.⁴ Ervin, M.⁵

8
- 1842484069
- 1385-3449,. 10.1023/B:JECR.0000015661.81386.e6
- A. K. Tagantsev, V. O. Sherman, K. F. Astafiev, J. Venkatesh, and N. Setter, J. Electroceram. 1385-3449 11, 5 (2003). 10.1023/B:JECR.0000015661. 81386.e6
- (2003) J. Electroceram. , vol.11 , pp. 5
- Tagantsev, A.K.¹ Sherman, V.O.² Astafiev, K.F.³ Venkatesh, J.⁴ Setter, N.⁵

9
- 0001443256
- 0003-6951,. 10.1063/1.125272
- P. Padmini, T. R. Taylor, M. J. Lefevre, A. S. Nagra, R. A. York, and J. S. Speck, Appl. Phys. Lett. 0003-6951 75, 3186 (1999). 10.1063/1.125272
- (1999) Appl. Phys. Lett. , vol.75 , pp. 3186
- Padmini, P.¹ Taylor, T.R.² Lefevre, M.J.³ Nagra, A.S.⁴ York, R.A.⁵ Speck, J.S.⁶

10
- 0001212954
- 0003-6951,. 10.1063/1.125839
- J. Im, O. Auciello, P. K. Baumann, S. K. Streiffer, D. Y. Kaufman, and A. R. Krauss, Appl. Phys. Lett. 0003-6951 76, 625 (2000). 10.1063/1.125839
- (2000) Appl. Phys. Lett. , vol.76 , pp. 625
- Im, J.¹ Auciello, O.² Baumann, P.K.³ Streiffer, S.K.⁴ Kaufman, D.Y.⁵ Krauss, A.R.⁶

11
- 0033106659
- 0896-1107,. 10.1023/A:1007797131173
- G. Vendik, E. K. Hollmann, A. B. Kozyrev, and A. M. Prudan, J. Supercond. 0896-1107 12, 325 (1999). 10.1023/A:1007797131173
- (1999) J. Supercond. , vol.12 , pp. 325
- Vendik, G.¹ Hollmann, E.K.² Kozyrev, A.B.³ Prudan, A.M.⁴

12
- 0001904072
- 0003-6951,. 10.1063/1.118106
- L. A. Knauss, J. M. Pond, J. S. Horwitz, D. B. Chrisey, C. H. Mueller, and R. Treece, Appl. Phys. Lett. 0003-6951 69, 25 (1996). 10.1063/1.118106
- (1996) Appl. Phys. Lett. , vol.69 , pp. 25
- Knauss, L.A.¹ Pond, J.M.² Horwitz, J.S.³ Chrisey, D.B.⁴ Mueller, C.H.⁵ Treece, R.⁶

13
- 0000289419
- 0003-6951,. 10.1063/1.123446
- W. Chang, J. S. Horwitz, A. C. Carter, J. M. Pond, S. W. Kirchoefer, C. M. Gilmore, and D. B. Chrisey, Appl. Phys. Lett. 0003-6951 74, 1033 (1999). 10.1063/1.123446
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1033
- Chang, W.¹ Horwitz, J.S.² Carter, A.C.³ Pond, J.M.⁴ Kirchoefer, S.W.⁵ Gilmore, C.M.⁶ Chrisey, D.B.⁷

14
- 60249102354
- 0040-6090,. 10.1016/j.tsf.2008.10.123
- C. V. Varanasi, K. D. Leedy, D. H. Tomich, and G. Subramanayam, Thin Solid Films 0040-6090 517, 2878 (2009). 10.1016/j.tsf.2008.10.123
- (2009) Thin Solid Films , vol.517 , pp. 2878
- Varanasi, C.V.¹ Leedy, K.D.² Tomich, D.H.³ Subramanayam, G.⁴

15
- 0037615176
- 0021-4922,. 10.1143/JJAP.42.1315
- T. -G. Kim, J. Oh, Y. Kim, T. Moon, K. S. Hong, and B. Park, Jpn. J. Appl. Phys. 0021-4922 42, 1315 (2003). 10.1143/JJAP.42.1315
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 1315
- Kim, T.-G.¹ Oh, J.² Kim, Y.³ Moon, T.⁴ Hong, K.S.⁵ Park, B.⁶

16
- 0000655143
- 0021-8979,. 10.1063/1.372297
- W. Chang, C. M. Gilmore, W. -J. Kim, J. M. Pond, S. W. Kirchoefer, S. B. Qadri, D. B. Chirsey, and J. S. Horwitz, J. Appl. Phys. 0021-8979 87, 3044 (2000). 10.1063/1.372297
- (2000) J. Appl. Phys. , vol.87 , pp. 3044
- Chang, W.¹ Gilmore, C.M.² Kim, W.-J.³ Pond, J.M.⁴ Kirchoefer, S.W.⁵ Qadri, S.B.⁶ Chirsey, D.B.⁷ Horwitz, J.S.⁸

17
- 0000897749
- 3 thin films from 1 mHz to 20 GHz
- DOI 10.1063/1.120796, PII S0003695198001041
- J. D. Baniecki, R. B. Laibowitz, T. M. Shaw, P. R. Duncombe, D. A. Neumayer, and D. E. Kotecki, Appl. Phys. Lett. 0003-6951 72, 498 (1998). 10.1063/1.120796 (Pubitemid 128672357)
- (1998) Applied Physics Letters , vol.72 , Issue.4 , pp. 498-500
- Baniecki, J.D.¹ Laibowitz, R.B.² Shaw, T.M.³ Duncombe, P.R.⁴ Neumayer, D.A.⁵ Kotecki, D.E.⁶ Shen, H.⁷ Ma, Q.Y.⁸

18
- 36549092472
- 0003-6951,. 10.1063/1.101471
- X. D. Wu, A. Inam, M. S. Hegde, B. Wilkens, C. C. Chang, D. M. Hwang, L. Nazar, T. Venkatesan, S. Miura, S. Matsubara, Y. Miyasaka, and N. Shohata, Appl. Phys. Lett. 0003-6951 54, 754 (1989). 10.1063/1.101471
- (1989) Appl. Phys. Lett. , vol.54 , pp. 754
- Wu, X.D.¹ Inam, A.² Hegde, M.S.³ Wilkens, B.⁴ Chang, C.C.⁵ Hwang, D.M.⁶ Nazar, L.⁷ Venkatesan, T.⁸ Miura, S.⁹ Matsubara, S.¹⁰ Miyasaka, Y.¹¹ Shohata, N.¹²

19
- 0041497075
- 0003-6951,. 10.1063/1.102409
- S. Witanachchi, S. Patel, D. T. Shaw, and H. S. Kwok, Appl. Phys. Lett. 0003-6951 55, 295 (1989). 10.1063/1.102409
- (1989) Appl. Phys. Lett. , vol.55 , pp. 295
- Witanachchi, S.¹ Patel, S.² Shaw, D.T.³ Kwok, H.S.⁴

20
- 0029373277
- 0003-6951,. 10.1063/1.115064
- D. H. Kim and H. S. Kwok, Appl. Phys. Lett. 0003-6951 67, 1803 (1995). 10.1063/1.115064
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1803
- Kim, D.H.¹ Kwok, H.S.²

21
- 4344641257
- 0272-8842,. 10.1016/j.ceramint.2003.12.136
- D. Y. Wang, C. L. Mak, K. H. Wong, H. L. W. Chan, and C. L. Choy, Ceram. Int. 0272-8842 30, 1745 (2004). 10.1016/j.ceramint.2003.12.136
- (2004) Ceram. Int. , vol.30 , pp. 1745
- Wang, D.Y.¹ Mak, C.L.² Wong, K.H.³ Chan, H.L.W.⁴ Choy, C.L.⁵

22
- 0004834835
- 0003-6951,. 10.1063/1.100488
- S. Miura, T. Yoshitake, Y. Miyasaka, and N. Shohata, Appl. Phys. Lett. 0003-6951 53, 1967 (1988). 10.1063/1.100488
- (1988) Appl. Phys. Lett. , vol.53 , pp. 1967
- Miura, S.¹ Yoshitake, T.² Miyasaka, Y.³ Shohata, N.⁴

23
- 0037416581
- 0003-6951,. 10.1063/1.1556962
- D. Y. Kim, S. E. Moon, E. K. Kim, S. J. Lee, J. J. Choi, and H. E. Kim, Appl. Phys. Lett. 0003-6951 82, 1455 (2003). 10.1063/1.1556962
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1455
- Kim, D.Y.¹ Moon, S.E.² Kim, E.K.³ Lee, S.J.⁴ Choi, J.J.⁵ Kim, H.E.⁶

24
- 33749137519
- 3 thin films
- DOI 10.1016/j.vacuum.2006.05.002, PII S0042207X06001813
- K. Venkata Saravanan, K. Sudheendran, M. Ghanashyam Krishna, K. C. James Raju, and A. K. Bhatnagar, Vacuum 0042-207X 81, 307 (2006). 10.1016/j.vacuum. 2006.05.002 (Pubitemid 44468405)
- (2006) Vacuum , vol.81 , Issue.3 , pp. 307-316
- Venkata Saravanan, K.¹ Sudheendran, K.² Ghanashyam Krishna, M.³ James Raju, K.C.⁴ Bhatnagar, A.K.⁵

25
- 67650097361
- 0022-3727,. 10.1088/0022-3727/42/4/045401
- K. Venkata Saravanan, K. Sudheendran, M. Ghanashyam Krishna, and K. C. James Raju, J. Phys. D: Appl. Phys. 0022-3727 42, 045401 (2009). 10.1088/0022-3727/42/4/045401
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 045401
- Saravanan, K.V.¹ Sudheendran, K.² Krishna, M.G.³ Raju, K.C.J.⁴

26
- 72449150529
- JCPDS Card No. 39-1395
- JCPDS Card No. 39-1395.

27
- 0036607423
- Phase diagrams and dielectric response of epitaxial barium strontium titanate films: A theoretical analysis
- DOI 10.1063/1.1473675
- Z. -G. Ban and S. P. Alpay, J. Appl. Phys. 0021-8979 91, 9288 (2002). 10.1063/1.1473675 (Pubitemid 34638054)
- (2002) Journal of Applied Physics , vol.91 , Issue.11 , pp. 9288
- Ban, Z.-G.¹ Alpay, S.P.²

28
- 0037250098
- 0021-8979,. 10.1063/1.1524310
- Z. -G. Ban and S. P. Alpay, J. Appl. Phys. 0021-8979 93, 504 (2003). 10.1063/1.1524310
- (2003) J. Appl. Phys. , vol.93 , pp. 504
- Ban, Z.-G.¹ Alpay, S.P.²

29
- 72449169480
- JCPDS Card No. 04-0802
- JCPDS Card No. 04-0802.

30
- 0003472812
- (Dover, New York)
- B. E. Warren, X-Ray Diffraction (Dover, New York, 1990), p. 257.
- (1990) X-Ray Diffraction , pp. 257
- Warren, B.E.¹

31
- 85086626952
- 1013-9826,. 10.4028/www.scientific.net/KEM.336-338.79
- T. J. Zhang, S. Z. Li, B. S. Zhang, W. H. Huang, and R. K. Pan, Key Eng. Mater. 1013-9826 336-338, 79 (2007). 10.4028/www.scientific.net/KEM.336-338.79
- (2007) Key Eng. Mater. , vol.336-338 , pp. 79
- Zhang, T.J.¹ Li, S.Z.² Zhang, B.S.³ Huang, W.H.⁴ Pan, R.K.⁵

32
- 0035922144
- 1359-6454,. 10.1016/S1359-6454(01)00139-2
- Y. G. Yang, X. W. Zhou, R. A. Johnson, and H. N. G. Wadley, Acta Mater. 1359-6454 49, 3321 (2001). 10.1016/S1359-6454(01)00139-2
- (2001) Acta Mater. , vol.49 , pp. 3321
- Yang, Y.G.¹ Zhou, X.W.² Johnson, R.A.³ Wadley, H.N.G.⁴

33
- 0031207306
- 0040-6090,. 10.1016/S0040-6090(96)09595-8
- S. B. Krupanidhi and C. J. Peng, Thin Solid Films 0040-6090 305, 144 (1997). 10.1016/S0040-6090(96)09595-8
- (1997) Thin Solid Films , vol.305 , pp. 144
- Krupanidhi, S.B.¹ Peng, C.J.²

34
- 0343844401
- 3 thin films
- DOI 10.1016/S0040-6090(00)01230-X
- F. Yan, P. Bao, Z. G. Zhang, J. S. Zhu, Y. N. Wang, H. L. W. Chan, and C. L. Choy, Thin Solid Films 0040-6090 375, 184 (2000). 10.1016/S0040-6090(00) 01230-X (Pubitemid 32030419)
- (2000) Thin Solid Films , vol.375 , Issue.1-2 , pp. 184-187
- Yan, F.¹ Bao, P.² Zhang, Z.³ Zhu, J.⁴ Wang, Y.⁵ Chan, H.L.W.⁶ Choy, C.-L.⁷

35
- 0037460306
- 0040-6090,. 10.1016/S0040-6090(02)00918-5
- S. U. Adikary and H. L. W. Chan, Thin Solid Films 0040-6090 424, 70 (2003). 10.1016/S0040-6090(02)00918-5
- (2003) Thin Solid Films , vol.424 , pp. 70
- Adikary, S.U.¹ Chan, H.L.W.²

36
- 0037012524
- Dielectric tunability of barium strontium titanate films prepared by a sol-gel method
- DOI 10.1016/S0040-6090(02)00083-4, PII S0040609002000834
- M. Nayak and T. Y. Tseng, Thin Solid Films 0040-6090 408, 194 (2002). 10.1016/S0040-6090(02)00083-4 (Pubitemid 34449096)
- (2002) Thin Solid Films , vol.408 , Issue.1-2 , pp. 194-199
- Nayak, M.¹ Tseng, T.-Y.²

37
- 0001634079
- 0021-8979,. 10.1063/1.365665
- M. S. Tsai, S. C. Sun, and T. Y. Tseng, J. Appl. Phys. 0021-8979 82, 3482 (1997). 10.1063/1.365665
- (1997) J. Appl. Phys. , vol.82 , pp. 3482
- Tsai, M.S.¹ Sun, S.C.² Tseng, T.Y.³

38
- 0000386330
- Integration of nonlinear dielectric barium strontium titanate with polycrystalline yttrium iron garnet
- DOI 10.1063/1.123617, PII S0003695199004118
- Q. X. Jia, J. R. Groves, P. Arendt, Y. Fan, A. T. Findikoglu, S. R. Foltyn, H. Jiang, and F. A. Miranda, Appl. Phys. Lett. 0003-6951 74, 1564 (1999). 10.1063/1.123617 (Pubitemid 129708785)
- (1999) Applied Physics Letters , vol.74 , Issue.11 , pp. 1564-1566
- Jia, Q.X.¹ Groves, J.R.² Arendt, P.³ Fan, Y.⁴ Findikoglu, A.T.⁵ Foltyn, S.R.⁶ Jiang, H.⁷ Miranda, F.A.⁸

39
- 55049133102
- 1862-5282
- F. Paul, A. Giere, W. Menesklou, J. R. Binder, P. Scheele, R. Jakoby, and J. HauΒelt, Int. J. Mater. Res. 1862-5282 99, 1119 (2008).
- (2008) Int. J. Mater. Res. , vol.99 , pp. 1119
- Paul, F.¹ Giere, A.² Menesklou, W.³ Binder, J.R.⁴ Scheele, P.⁵ Jakoby, R.⁶ Hauelt, J.⁷

40
- 0031141781
- 0038-1098,. 10.1016/S0038-1098(97)00052-5
- T. Schimizu, Solid State Commun. 0038-1098 102, 523 (1997). 10.1016/S0038-1098(97)00052-5
- (1997) Solid State Commun. , vol.102 , pp. 523
- Schimizu, T.¹

41
- 0000062056
- 3 thin films
- DOI 10.1063/1.121751, PII S0003695198046282
- H. C. Li, W. D. Si, A. D. West, and X. X. Xi, Appl. Phys. Lett. 0003-6951 73, 190 (1998). 10.1063/1.121751 (Pubitemid 128673722)
- (1998) Applied Physics Letters , vol.73 , Issue.2 , pp. 190-192
- Li, H.-C.¹ Si, W.² West, A.D.³ Xi, X.X.⁴

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