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Acta Materialia

Volumn 49, Issue 16, 2001, Pages 3321-3332

Monte Carlo simulation of hyperthermal physical vapor deposition

(4) Yang, Y G a Zhou, X W a Johnson, R A a Wadley, H N G a

a University of Virginia (United States)

Author keywords

Monte Carlo simulation; Physical vapor deposition (PVD); Thin films

Indexed keywords

ATOMS; GROWTH (MATERIALS); KINETIC ENERGY; MOLECULAR DYNAMICS; MONTE CARLO METHODS; NICKEL; RATE CONSTANTS; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS; THERMAL DIFFUSION; THIN FILMS;

ATOMIC FLUXES; ATOMIC REFLECTION; HYDROTHERMAL PROCESSES;

PHYSICAL VAPOR DEPOSITION;

EID: 0035922144 PISSN: 13596454 EISSN: None Source Type: Journal
DOI: 10.1016/S1359-6454(01)00139-2 Document Type: Article

Times cited : (33)

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