Aminosilane densities on nanotextured silicon

Materials Science and Engineering C

Volumn 29, Issue 8, 2009, Pages 2340-2345

  Rathor, Nitin ^a   Panda, Siddhartha ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

Aminosilane; Nanotexture; Sensor; Silicon surface

Indexed keywords

AMINE GROUPS; AMINOSILANES; CRYSTALLINE SILICON SURFACES; HYDROXYLATED SURFACES; LOWER DENSITY; NANO-TEXTURE; NANOTEXTURED; PROCESS CONDITION; RMS ROUGHNESS; SELF-ASSEMBLED; SILICON SURFACES; SURFACE AREA; SURFACE OXIDATIONS; SURFACE TEXTURES;

AMINES; FLUORINE CONTAINING POLYMERS; OXIDATION; PROCESS CONTROL; SENSORS; SILANES; TEXTURES;

SURFACE TOPOGRAPHY;

EID: 72049109673     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2009.06.003     Document Type: Article

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