Tunable vertical comb for driving micromirror realized by bending device wafer

IEICE Transactions on Electronics

Volumn E90-C, Issue 1, 2007, Pages 147-148

  Sasaki, Minoru ^a   Ishimori, Masahiro ^a   Song, Jonghyeong ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Micromirror; Tuning; Vertical comb; Wafer bending

Indexed keywords

ACTUATORS; BENDING (FORMING); GEOMETRY; MICROOPTICS; MICROSTRUCTURE; TUNING;

MICROMIRRORS; VERTICAL COMB; WAFER BENDING;

MIRRORS;

EID: 33846461236     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e90-c.1.147     Document Type: Conference Paper

References (8)

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