Non-tilting out-of-plane mode high-Q mechanical silicon oscillator

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1848-1853

  Hahtela, O ^a   Chekurov, N ^a   Tittonen, I ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; LASER BEAMS; NATURAL FREQUENCIES; SILICON; SINGLE CRYSTALS;

HIGH-QUALITY FACTOR; INTERFEROMETRIC LASER BEAM; PHASE-SENSITIVE DETECTION; SILICON OSCILLATOR;

OSCILLATORS (ELECTRONIC);

EID: 24644497192     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/009     Document Type: Review

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