Large-area surface wave plasmas using microwave multi-slot antennas for nanocrystalline diamond film deposition

Plasma Sources Science and Technology

Volumn 19, Issue 1, 2010, Pages

  Kim, J ^a   Tsugawa, K ^a   Ishihara, M ^a   Koga, Y ^a   Hasegawa, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY CONFIGURATIONS; HYDROGEN GAS; MICROWAVE RADIATIONS; MIXED GAS; MULTISLOT ANTENNAS; NANOCRYSTALLINE DIAMOND FILMS; NCD FILMS; PLASMA PROPAGATION; SURFACE WAVE PLASMA; THICKNESS VARIATION;

ANTENNA ARRAYS; BOROSILICATE GLASS; DIAMOND FILMS; FLUID DYNAMICS; MICROWAVE ANTENNAS; MICROWAVES; PLASMAS; SURFACE WAVES; WATER WAVES;

SLOT ANTENNAS;

EID: 70450173246     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/1/015003     Document Type: Article

References (23)

1. Lee J-K, Eun K Y, Baik Y-J, Cheon H J, Rhyu J W, Shin T J and Park J-W 2002 Diamond Relat. Mater. 11 463
2. Ando Y, Yokota Y, Tachibana T, Watanabe A, Nishibayashi Y, Kobashi K, Hirao T and Oura K 2002 Diamond Relat. Mater. 11 596
3. Schäfer L, Höfer M and Kröger R 2006 Thin Solid Films 15 1017
4. Zimmer J and Ravi K V 2006 Diamond Relat. Mater. 15 229
5. Tsugawa K, Ishihara M, Kim J, Hasegawa M and Koga Y 2006 New Diamond Frontier Carbon Technol. 16 337
6. King D, Yaran M K, Schuelke T, Grotjohn T A, Reinhard D K and Asmussen J 2008 Diamond Relat. Mater. 17 520
7. Kim J and Katsurai M 2007 J. Appl. Phys. 101 023301
8. Sugai H, Ghanashev I and Nagatsu M 1998 Plasma Sources Sci. Technol. 7 192
9. Korzec D, Werner F, Winter R and Engemann J 1996 Plasma Sources Sci. Technol. 5 216
10. Werner F, Korzec D and Engemann J 1996 J. Vac. Sci. Technol. A 14 3065
11. Nagatsu M, Xu G, Ghanashev I, Kanoh M and Sugai H 1997 Plasma Sources Sci. Technol. 6 427
12. Nagatsu M, Ghanashev I and Sugai H 1998 Plasma Sources Sci. Technol. 7 230
13. Kanoh M, Aoki K, Yamauchi T and Kataoka Y 2000 Japan. J. Appl. Phys. 39 5292
14. Suzuki N, Kitagawa H and Uchiyama S 2002 Japan. J. Appl. Phys. 41 3930
15. Yamauchi T and Sugai H 2002 J. Vac. Sci. Technol. A 20 513
16. Yasaka Y, Sakae A, Sugimoto N, Takeno H and Hojo H 2006 Japan. J. Appl. Phys. 45 8059
17. Toyoyoshi R, Sakamoto T, Matsuura H and Akatsuka H 2007 Japan. J. Appl. Phys. 46 3566
18. Senda K, Umehara K and Sakamoto Y 2003 IEICE Trans. Electron. E86-C 2479
19. Taflove A 1995 Computational Electrodynamics, the Finite-Difference Time-Domain Method (Boston: Artech House)
20. Teii K and Yoshida T 1999 J. Appl. Phys. 85 1864
21. Sugai H, Ghanashev I and Mizuno K 2000 Appl. Phys. Lett. 77 3523
22. Allis W P, Buchsbaum S J and Bers A 1963 Waves in Anisotropic Plasmas (Cambridge, MA: MIT Press)
23. Aliev Y M, Schuter H and Shivarova A 2000 Guided-Wave-Produced Plasmas (Berlin: Springer)