Probe and optical emission spectroscopy measurement of slotted antenna-excited nitrogen discharge plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 6 A, 2007, Pages 3566-3572

  Toyoyoshi, Reo ^a   Sakamoto, Takeshi ^a   Matsuura, Haruaki ^a   Akatsuka, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Nitrogen plasma; Optical emission spectroscopy; Rotational temperature; Surface wave excited plasma; Vibrational temperature; Volume wave excited plasma

Indexed keywords

ANGLE MEASUREMENT; NITROGEN; OPTICAL EMISSION SPECTROSCOPY; SLOT ANTENNAS; SURFACE WAVES; TEMPERATURE MEASUREMENT;

PROBE MEASUREMENT; ROTATIONAL TEMPERATURE; SURFACE WAVE EXCITED PLASMAS; VIBRATIONAL TEMPERATURE; VOLUME WAVE EXCITED PLASMAS;

PLASMAS;

EID: 34547828828     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.3566     Document Type: Article

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