Surface wave operation mode of the slot antenna microwave plasma source SLAN

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3065-3070

  Werner, F ^a   Korzec, D ^a   Engemann, J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030520325     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580172     Document Type: Article

References (19)

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