Stable surface-wave plasma through excitation of standing surface wave using plane multislot antenna

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 A, 2002, Pages 3930-3935

  Suzuki, Nobumasa ^a   Kitagawa, Hideo ^a   Uchiyama, Shinzo ^a  

^a CANON INC   (Japan)

Author keywords

Circular waveguide; High density plasma; Low temperature plasma; Multislot antenna; Standing surface wave; Surface wave plasma

Indexed keywords

DIELECTRIC RELAXATION; DIFFUSION IN SOLIDS; PLASMA DENSITY; PLASMA STABILITY; PRESSURE EFFECTS; SLOT ANTENNAS; SUBSTRATES; SURFACE WAVES;

HIGH DENSITY PLASMA; PLANE MULTISLOT ANTENNA;

PLASMA WAVES;

EID: 0036614833     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)