Spatial structure of waves and plasma uniformity in planar microwave discharges

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 B, 2006, Pages 8059-8064

  Yasaka, Yasuyoshi ^a   Sakae, Atsushi ^a   Sugimoto, Naoki ^a   Takeno, Hiromasa ^a   Hojo, Hitoshi ^b  

^a KOBE UNIVERSITY   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Density jump; FDTD calculation; Mode numbers; MSP antenna; Resonance absorption; Surface wave eigenmodes

Indexed keywords

ELECTRIC DISCHARGES; FINITE DIFFERENCE METHOD; SURFACE WAVES;

MODE NUMBERS; MSP ANTENNA; SURFACE WAVE EIGENMODES;

PLANAR WAVEGUIDES;

EID: 34547859296     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.8059     Document Type: Article

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