Effect of the resonant growth of harmonics on the electron density in capacitively coupled plasma

Applied Physics Letters

Volumn 95, Issue 19, 2009, Pages

  Yamazawa, Yohei ^a  

^a TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED PLASMAS; ELECTRON DENSITIES; EXTERNAL CIRCUITS; FOURTH HARMONICS; PLASMA PROCESS CHAMBER; PLASMA SERIES RESONANCE; VARIABLE CAPACITOR;

CARRIER CONCENTRATION; ELECTRON DENSITY MEASUREMENT; HARMONIC ANALYSIS; INDUCTIVELY COUPLED PLASMA; RESONANCE;

ELECTRONS;

EID: 70449727966     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3261752     Document Type: Article

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