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Volumn 95, Issue 19, 2009, Pages

High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

(7) Altoukhov, Alexei a Levrat, Jacques a Feltin, Eric a Carlin, Jean Fraņois a Castiglia, Antonino a Butt́, Raphal a Grandjean, Nicolas a

a EPFL (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; ETCHING PROCESS; GAN LAYERS; HIGH REFLECTIVITY; MICRO-REFLECTIVITY; OXIDATION PROCESS; PEAK REFLECTIVITY; SACRIFICIAL LAYER; STOPBAND; WET-CHEMICAL ETCHING;

BRAGG CELLS; DISTRIBUTED BRAGG REFLECTORS; GALLIUM NITRIDE; OXIDATION; REFLECTION; REFRACTIVE INDEX; SEMICONDUCTING GALLIUM;

WET ETCHING;

EID: 70449719186 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3259720 Document Type: Article

Times cited : (15)

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