Stress engineering during metalorganic chemical vapor deposition of AlGaN/GaN distributed Bragg reflectors

Applied Physics Letters

Volumn 78, Issue 21, 2001, Pages 3205-3207

  Waldrip, K E ^a   Han, J ^a   Figiel, J J ^a   Zhou, H ^b   Makarona, E ^b   Nurmikko, A V ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Brown University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035927009     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1371240     Document Type: Article

References (16)

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