Optical readout sensitivity of deformed microreflector for uncooled infrared detector: Theoretical model and experimental validation

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 26, Issue 11, 2009, Pages 2353-2361

  Cheng, Teng ^a   Zhang, Qingchuan ^a   Jiao, Binbin ^b   Chen, Dapeng ^b   Wu, Xiaoping ^a  

^a University of Science and Technology of China   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINE CONTAINING POLYMERS; INFRARED DETECTORS; REFLECTION;

BI-LAYER STRUCTURE; CURVATURE RADII; EXPERIMENTAL VALIDATIONS; MICRO-REFLECTORS; MICROMECHANICAL DEVICE; OPTICAL READOUT; OPTICAL SOLUTIONS; SENSITIVITY PEAKS; THEORETICAL MODELS; UNCOOLED INFRARED DETECTORS;

DETECTORS;

EID: 70449707747     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.26.002353     Document Type: Article

References (25)

1. J. M. Lloyd, Thermal Imaging Systems (Plenum, 1975).
2. J. L. Miller, Principles of Infrared Technology (Van Nostram Reinhold, 1994).
3. R. Amantea, L. A. Goodman, F. P. Pantuso, D. J. Sauer, M. Varhese, T. S. Villianni, and L. K. White, "Progress toward an uncooled IR imager with 5-mK NETD," Proc. SPIE 3436, 647-659 (1998).
4. R. S. Balcerak, "Uncooled IR imaging: technology for the next generation," Proc. SPIE 3698, 110-118 (1999).
5. J. K. Gimzewski, Ch. Gerber, E. Meyer, and R. R. Schlittler, "Observation of a chemical reaction using a micromechanical sensor," Chem. Phys. Lett. 217, 589-594 (1994).
6. J. R. Barnes, S. J. Stephenson, M. E. Welland, Ch. Gerber, and J. K. Gimzewski, "Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device," Nature (London) 72, 79-82 (1994).
7. J. Varesi, J. Lai, T. Perazzo, Z. Shi, and A. Majumdar, "Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors," Appl. Phys. Lett. 71, 306 (1997).
8. D. Sarid, Scanning Force Microscopy (Oxford Univ. Press, 1991).
9. H. P. Lang, R. Berger, C. Andreoli, J. Brugger, M. Despont, P. Vettiger, Ch. Gerber, J. K. Gimzewski, J. P. Ramseyer, E. Meyer, and H. J. Guntherodt, "Sequential position readout from arrays of micromechanical cantilever sensors," Appl. Phys. Lett. 72, 383 (1998).
10. T. Ishizuya, J. Suzuki, K. Akagawa, and T. Kazama, "160 ×120 pixels optically readable bimaterial infrared detector," in The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2002), pp. 578-581.
11. T. Perazzo, M. Mao, O. Kwon, A. Majumdar, J. B. Varesi, and P. Norton, "Infrared vision using uncooled microoptomechanical camera," Appl. Phys. Lett. 74, 3567-3569 (1999). (Pubitemid 129306213)
12. Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. B. Varesi, P. Norton, and J. Kitching, "Optomechanical uncooled infrared imaging system: Design, microfabrication, and performance," J. Microelectromech. Syst. 11, 136-146 (2002).
13. P. G. Datskos, N. V. Lavrik, and S. Rajic, "Performance of uncooled microcantilever thermal detectors," Rev. Sci. Instrum. 75, 1134-1148 (2004).
14. D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, and B. McIntyre, "Uncooled infrared imaging using bimaterial microcantilever arrays," Appl. Phys. Lett. 89, 073118 (2006).
15. Z. H. Duan, Q. C. Zhang, X. P. Wu, L. Pan, D. P. Chen, X. P. Wu, and Z. Y. Guo, "Uncooled optically readable bimaterial micro-cantilever infrared imaging device," Chin. Phys. Lett. 20, 2130 (2003).
16. L. Pan, Q. C. Zhang, X. P. Wu, Z. H. Duan, D. P. Chen, W. B. Wang, and Z. Y. Guo, "MEMS based optomechanical infrared imaging," J. Experimental Mechanics 19, 403-407 (2004) (in Chinese).
17. C. B. Li, B. B. Jiao, S. L. Shi, D. P. Chen, T. C. Ye, Q. C. Zhang, Z. Y. Guo, F. L. Dong, and Z. Y. Miao, "A novel uncooled substrate-free optical-readable infrared detector: design, fabrication and performance," Meas. Sci. Technol. 17, 1981-1986 (2006).
18. Z. Y. Miao, Q. C. Zhang, D. P. Chen, Z. Y. Guo, F. L. Dong, Z. M. Xiong, X. P. Wu, C. B. Li, and B. B. Jiao, "Uncooled IR imaging using optomechanical detectors," Ultramicroscopy 107, 610-616 (2007).
19. F. L. Dong, Q. C. Zhang, D. P. Chen, Z. Y. Miao, Z. M. Xiong, Z. Y. Guo, C. B. Li, B. B. Jiao, and X. P. Wu, "Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array," Ultramicroscopy 108, 579-588 (2008).
20. D. Grbovic, N. V. Lavrik, S. Rajic, and P. G. Datskos, "Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors," J. Appl. Phys. 104, 051508 (2008).
21. Z. Y. Miao, Q. C. Zhang, Z. Y. Guo, X. P. Wu, and D. P. Chen, "Optical readout method for microcantilever array sensing and its sensitivity analysis," Opt. Lett. 32, 594-596 (2007).
22. T. Cheng, Q. C. Zhang, X. P. Wu, D. P. Chen, and B. B. Jiao, "Uncooled infrared imaging using a substrate-free focalplane array," IEER Electr. Device L. 29, 1218-1221 (2008).
23. T. Cheng, Q. C. Zhang, D. P. Chen, H. T. Shi, J. Gao, and X. P. Wu, "Performance of an optimized substrate-free focal plane array for optical readout uncooled infrared detector," J. Appl. Phys. 105, 034505-7 (2009).
24. R. G. Elliman, T. D. M. Weijers-Dall, M. G. Spooner, T. H. Kim, and A. R. Wilkinson, "Stress and stress relief in dielectric thin films-the role of hydrogen," Nucl. Instrum. Methods Phys. Res. B 249, 310-313 (2006).
25. F. L. Dong, B. B. Jiao, Q. C. Zhang, D. P. Chen, Z. Y. Miao, and Z. M. Xiong, "Advance in optically readable uncooled infrared imaging," J. Exp. Mech. 22, 401-406 (2007) (in Chinese).