Optical readout method for microcantilever array sensing and its sensitivity analysis

Optics Letters

Volumn 32, Issue 6, 2007, Pages 594-596

  Miao, Zhengyu ^a   Zhang, Qingchuan ^a   Guo, Zheying ^a   Wu, Xiaoping ^a   Chen, Dapeng ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MICROCANTILEVER ARRAY; MICROMIRROR DEFORMATION;

BENDING (DEFORMATION); INFRARED IMAGING; MATHEMATICAL MODELS; OPTICAL FILTERS;

CANTILEVER BEAMS;

EID: 33847628054     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.32.000594     Document Type: Article

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