Arrays of SiO2 substrate-free micromechanical uncooled infrared and terahertz detectors

Journal of Applied Physics

Volumn 104, Issue 5, 2008, Pages

  Grbovic, D ^b   Lavrik, N V ^b   Rajic, S ^b   Datskos, P G ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUILDING MATERIALS; DISSIMILAR MATERIALS; OPTICAL DESIGN; SILICON COMPOUNDS; THERMAL EXPANSION; THERMAL SPRAYING;

BI MATERIALS; CHEMICAL-; COEFFICIENTS OF THERMAL EXPANSIONS; DETECTOR ARRAYS; DETECTOR SENSITIVITY; MICRO-MECHANICAL; NOISE-EQUIVALENT TEMPERATURE DIFFERENCE; OPTICAL READOUTS; PROCESS FLOWS; SHAPE AND SIZE; STRUCTURAL MATERIALS; TERAHERTZ; TWO TYPES; UNCOOLED INFRARED; WET-ETCHING;

DETECTORS;

EID: 44349177742     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2959574     Document Type: Article

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