Stress and stress relief in dielectric thin films - the role of hydrogen

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 310-313

  Elliman, R G ^a   Weijers Dall, T D M ^a   Spooner, M G ^a   Kim, Tae Hyun ^a   Wilkinson, A R ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Crack; ERD; Hydrogen; PECVD; Stress; Thin film

Indexed keywords

ANNEALING; CRACKS; HYDROGEN; OSCILLATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; STRESS RELIEF; STRESSES; SUBSTRATES; TENSILE STRESS; THERMAL EFFECTS; THIN FILMS;

ANNEALING TEMPERATURE; DIELECTRIC THIN FILMS; ERD; PECVD;

DIELECTRIC FILMS;

EID: 33745818576     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.04.018     Document Type: Article

References (20)

1. Lane M. Ann. Rev. Mater. Res. 33 (2003) 29
2. Thouless M.D. J. Vac. Sci. Technol. A 9 (1991) 2510
3. Yu H.H., and Hutchinson J.W. Thin Solid Films 423 (2003) 54
4. Hutchinson J.W., and Suo Z. Adv. Appl. Mech. 29 (1992) 63
5. Lawn B. In: Davis E.A. (Ed). Cambridge Solid State Series. second ed. (1993), Cambridge University Press, Cambridge
6. Huang M., Suo Z., Ma Q., and Fujimoto H. J. Mater. Res. 15 (2000) 1239
7. Hughey M.P., and Cook R.F. Mater. Res. Soc. Symp. Proc. 795 (2004) U1.6
8. J.W. Hutchinson, in: Mater. Res. Soc. Symp. Proc., 1989.
9. Lane M.W., Xia Hu L., and Shaw T.M. IEEE Trans. Dev. Mater. Reliab. 4 (2004) 142
10. Thouless M.D. Ann. Rev. Mater. Sci. 25 (1995) 69
11. Yu H.H., and Hutchinson J.W. Int. J. Fract. 113 (2002) 39
12. Spooner M.G., Walsh T.M., and Elliman R.G. Mater. Res. Soc. Symp. Proc. 770 (2003) 51
13. Elliman R.G., Timmers H., Ophel T.R., Weijers T.D.M., Wielunski L.S., and Harding G.L. Nucl. Instr. and Meth. B 161 (2000) 231
14. Elliman R.G., Timmers H., and Weijers T.D.M. Nucl. Instr. and Meth. B 219-220 (2004) 410
15. Timmers H., Elliman R.G., and Ophel T.R. Nucl. Instr. and Meth. A 447 (2000) 536
16. Timmers H., Ophel T.R., and Elliman R.G. Nucl. Instr. and Meth. B 161 (2000) 19
17. Bohn S., Douady S., and Couder Y. Phys. Rev. Lett. 94 (2005) 054503
18. Stoney G.G. Proc. Royal Soc. London A 82 (1909) 172
19. Stesmans A. J. Appl. Phys. 88 (2000) 489
20. Wilkinson A.R., and Elliman R.G. Phys. Rev. B 68 (2003) 155302