Nonlinear behavior of SOI free-free micromechanical beam resonator

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 203-210

  Palaniapan, Moorthi ^a   Khine, Lynn ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

MEMS; Micromechanical; Nonlinearity; Oscillator; Resonator

Indexed keywords

CONTROL NONLINEARITIES; MEMS; OSCILLATORS (ELECTRONIC); SILICON ON INSULATOR TECHNOLOGY; VOLTAGE CONTROL;

MEMS OSCILLATOR APPLICATIONS; MICROMECHANICAL BEAM RESONATOR;

RESONATORS;

EID: 38849106132     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.016     Document Type: Article

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