Structural stability of decorative ZrNxOy thin films

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 748-752

  Carvalho, P ^a   Vaz, F ^a   Rebouta, L ^a   Carvalho, S ^a   Cunha, L ^a   Goudeau, Ph ^b   Riviere J P ^b   Alves, E ^c   Cavaleiro, A ^d  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITÉ DE POITIERS   (France)

^c INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^d UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

Sputtering; Thermal degradation; Zirconium nitride

Indexed keywords

ANNEALING; CRYSTALLIZATION; HARDNESS; MAGNETRON SPUTTERING; PYROLYSIS; RESIDUAL STRESSES; THERMAL EFFECTS; THERMODYNAMIC STABILITY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

REACTIVE MAGNETRON SPUTTERING; ZIRCONIUM NITRIDE;

ZIRCONIUM COMPOUNDS;

PLASMA TREATMENT;

EID: 24644440514     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.100     Document Type: Article

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