Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 10, 2009, Pages 5887-5890

  Bartošík, Miroslav ^a   Kolíbal, Miroslav ^a   Čechal, Jan ^a   Mach, Jindřich ^a   Šikola, Tomáš ^a  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Cobalt islands; Gallium droplets; Local anodic oxidation; Metallic nanostructures; Patterning; Selective growth

Indexed keywords

AFM; ALTERNATIVE APPROACH; BOTTOM UP APPROACH; LOCAL ANODIC OXIDATION; MASK LESS; METALLIC ELEMENTS; METALLIC NANOSTRUCTURE; METALLIC NANOSTRUCTURES; OXIDE LINES; OXIDIZED SURFACES; PATTERNING; SELECTIVE GROWTH; SILICON SUBSTRATES; TECHNOLOGICAL PROCESS; TOPDOWN;

ATOMIC FORCE MICROSCOPY; COBALT; DROP FORMATION; GALLIUM; GALLIUM ALLOYS; METALLIC COMPOUNDS; MOS CAPACITORS; NANOSTRUCTURES; PROTECTIVE COATINGS; SUBSTRATES;

ANODIC OXIDATION;

EID: 70350334898     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.1251     Document Type: Article

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