Fabrication of nanostructures on Si(1 0 0) and GaAs(1 0 0) by local anodic oxidation

Applied Surface Science

Volumn 253, Issue 5, 2006, Pages 2373-2378

  Červenka, Jiří ^a   Kalousek, Radek ^a   Bartošík, Miroslav ^a   Škoda, David ^a   Tomanec, Ondřej ^a   Šikola, Tomáš ^a  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

AFM; Local anodic oxidation; Nanostructure fabrication; Nanotechnology

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; NANOTECHNOLOGY; PARAMETER ESTIMATION; SEMICONDUCTING GALLIUM ARSENIDE; SILICON COMPOUNDS; SURFACE PROPERTIES; THIN FILMS;

CHEMICAL ETCHING; LOCAL ANODIC OXIDATION; METALLIC NANOSTRUCTURES; NANOSTRUCTURE FABRICATION;

NANOSTRUCTURED MATERIALS;

EID: 33751420880     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.03.095     Document Type: Article

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