Automatic mode matching in MEMS vibrating gyroscopes using extremum-seeking control

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 10, 2009, Pages 3880-3891

  Antonello, Riccardo ^a   Oboe, Roberto ^b   Prandi, Luciano ^c   Biganzoli, Fabio ^c  

^a UNIVERSITY OF TRENTO   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c STMICROELECTRONICS   (Italy)

Author keywords

Automatic mode matching control; Electrostatic tuning; Extremum seeking control; Vibrating gyroscopes

Indexed keywords

ADAPTIVE CONTROLLERS; ADJUSTING MECHANISM; ANALOG ELECTRONICS; AUTOMATIC MODE; AUTOMATIC MODE-MATCHING CONTROL; ELECTROSTATIC TUNING; EXTERNAL ENVIRONMENTS; EXTREMUM-SEEKING CONTROL; FREQUENCY MATCHING; FREQUENCY MISMATCH; MAIN MODE; MANUFACTURING PRECISION; MATCHING CONDITION; MATCHING PROBLEMS; MAXIMIZATION PROBLEM; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-GYROSCOPE; MODE MATCHING; NORMAL OPERATIONS; PARAMETRIC VARIATION; POST-FABRICATION; PROCESS VARIATION; READ-OUT CIRCUIT; RESONANT FREQUENCIES; RESONANT MODE; SINGLE-AXIS; STMICROELECTRONICS; TUNABLE PARAMETER; UNDERLYING MECHANISM; VIBRATING GYROSCOPES;

ELECTROSTATICS; GYROSCOPES; MEMS; MICROELECTROMECHANICAL DEVICES; MULTIVARIABLE SYSTEMS; NATURAL FREQUENCIES; TUNING;

CONTROLLERS;

EID: 70349611069     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2009.2020707     Document Type: Article

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