A 0.2°/hr micro-gyroscope with automatic CMOS mode matching

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 2007, Pages 386-388

  Sharma, Ajit ^a   Zaman, M Faisal ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT LAYOUT; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT;

ANGULAR RATE SENSORS; AUTOMATIC MODE MATCHING; RESONANT MODES;

GYROSCOPES;

EID: 34547411233     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2007.373456     Document Type: Conference Paper

References (8)

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4. A. Sharma, M. F. Zaman and F. Ayazi, "A 104dB SNDR Transimpedance based CMOS ASIC for Tuning Fork Microgyroscopes," Proc. CICC, pp. 655-658, Sept., 2006.
5. D. Keymeulen et al., "Evolutionary Computation Applied to the Tuning of MEMS Gyroscopes," Proc. GECCO 2005, Vol. 1, pp. 927-935, June, 2005.
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7. J. Bastos, et al., "A 12-Bit Intrinsic Accuracy High-Speed CMOS DAC," IEEE J. Solid-State Circuits, pp. 1959-1969, Dec., 1998.
8. th IEEE Int'l Conf. MEMS, pp. 355-358, Jan., 2005.