Active structural error suppression in MEMS vibratory rate integrating gyroscopes

IEEE Sensors Journal

Volumn 3, Issue 5, 2003, Pages 595-606

  Painter, Chris C ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Error suppression; Microelectromechanical systems (MEMS); Rate integrating gyroscopes; Smart MEMS

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; ERROR ANALYSIS; ERROR COMPENSATION; FEEDBACK CONTROL; LASER APPLICATIONS; MATHEMATICAL MODELS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PERTURBATION TECHNIQUES;

ERROR SUPPRESSION; RATE INTEGRATING GYROSCOPES; SMART MEMS;

GYROSCOPES;

EID: 3042740979     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.817165     Document Type: Article

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