Design and fabrication of an automatic mode controlled vibratory gyroscope

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 674-677

  Sung, W T ^a   Lee, J Y ^a   Lee, J G ^a   Kang, T ^b  

^a Seoul National University   (South Korea)

^b Konkuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATIC TESTING; ELECTRODES; ELECTROSTATICS; FREQUENCIES; MANUAL CONTROL; MICROELECTROMECHANICAL DEVICES; SENSORS;

AUTOMATIC MODE CONTROL; SENSING ELECTRODES; TUNING CIRCUITS; VIBRATORY GYROSCOPES;

GYROSCOPES;

EID: 33750127853     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. D. Joachim and L. Lin, "Selective polysilicon deposition for frequency tuning of MEMS resonators," in Proc. IEEE MEMS2002, pp. 727-730.
2. T. Remtema and L. Lin, "Active frequency tuning for microresonators by localized thermal stressing effects," Sensors and Actuators A 91, 2001, pp. 326-32.
3. C. Jeong, et. al., "A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes," J. Micromech. Microeng., vol. 14 pp.1530-1536, 2004.
4. R. P. Leland, "Adaptive Mode Tuning for Vibrational Gyroscopes," IEEE Transactions on Control Systems Technology, Vol. 11, No. 2, March 2003.
5. S. Sung, et. al., "Design and performance test of an oscillation loop for a MEMS resonant accelerometer," J. Micromech. Microeng. 13, No 2 (March 2003) 246-253