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Volumn 56, Issue 6, 2007, Pages 2561-2569

Trajectory-switching algorithm for a MEMS gyroscope

Author keywords

Adaptive control; Force control; Force balancing control; Gyroscopes; Microelectromechanical systems (MEMS); Micromechanical devices; Position control; Trajectory switching

Indexed keywords

ALGORITHMS; CLOSED LOOP CONTROL SYSTEMS; FORCE CONTROL; GYROSCOPES; IDENTIFICATION (CONTROL SYSTEMS); POSITION CONTROL;

EID: 37249055433     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2007.908597     Document Type: Article
Times cited : (81)

References (9)
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    • Yazdi, N.1    Ayazi, F.2    Najafi, K.3
  • 2
    • 0002122966 scopus 로고    scopus 로고
    • Modeling and simulation of micromachined gyroscopes in the presence of imperfection
    • San Juan, PR
    • A. Shkel, R. T. Howe, and R. Horowitz, "Modeling and simulation of micromachined gyroscopes in the presence of imperfection," in Proc. Int. Conf. Modelling Simul. Microsyst., San Juan, PR, 1999, pp. 605-608.
    • (1999) Proc. Int. Conf. Modelling Simul. Microsyst , pp. 605-608
    • Shkel, A.1    Howe, R.T.2    Horowitz, R.3
  • 3
    • 0037301495 scopus 로고    scopus 로고
    • Adaptive control for the conventional mode of operation of MEMS gyroscope
    • Feb
    • S. Park and R. Horowitz, "Adaptive control for the conventional mode of operation of MEMS gyroscope," J. Microelectromech. Syst., vol. 12, no. 1, pp. 101-108, Feb. 2003.
    • (2003) J. Microelectromech. Syst , vol.12 , Issue.1 , pp. 101-108
    • Park, S.1    Horowitz, R.2
  • 4
    • 0033697639 scopus 로고    scopus 로고
    • A monolithic surface micromachined Z-axis gyroscope with digital output
    • Honolulu, HI, Jun
    • X. Jiang, J. Seeger, M. Kraft, and B. E. Boser, "A monolithic surface micromachined Z-axis gyroscope with digital output," in Proc. IEEE Symp. VLSI Circuits, Honolulu, HI, Jun. 2000, pp. 16-19.
    • (2000) Proc. IEEE Symp. VLSI Circuits , pp. 16-19
    • Jiang, X.1    Seeger, J.2    Kraft, M.3    Boser, B.E.4
  • 9
    • 0003666042 scopus 로고    scopus 로고
    • Micromachined vibratory rate gyroscopes,
    • Ph.D. dissertation, Univ. California, Berkeley, Berkeley, CA
    • W. A. Clark, "Micromachined vibratory rate gyroscopes," Ph.D. dissertation, Univ. California, Berkeley, Berkeley, CA, 1997.
    • (1997)
    • Clark, W.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.