Active frequency tuning for micro resonators by localized thermal stressing effects

Sensors and Actuators, A: Physical

Volumn 91, Issue 3, 2001, Pages 326-332

  Remtema, Todd ^a,b   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Electrothermal; Joule heating; Resonator

Indexed keywords

BEAMS AND GIRDERS; COMPUTER SIMULATION; HEATING; MATHEMATICAL MODELS; NATURAL FREQUENCIES; RESONATORS; THERMAL STRESS; TUNING; ELECTRIC PROPERTIES; FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; RELIABILITY; THERMAL EFFECTS; THERMODYNAMIC PROPERTIES;

ELECTROTHERMAL MODEL; FREQUENCY TUNING; JOULE HEATING; MICRO RESONATORS; ELECTROTHERMAL; THERMAL STRESSING EFFECTS;

MICROSENSORS; RESONATORS;

EID: 0035880222     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00603-3     Document Type: Article

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