Magnetron sputtering deposition of carbon nitride nanocolumns at low temperature

Journal of Physics D: Applied Physics

Volumn 42, Issue 18, 2009, Pages

  Zhang, Bin ^a,b   Yu, Yuanlie ^a,b   Zhang, Junyan ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL RESULTS; FIELD EMISSION TESTS; LOW TEMPERATURES; MAGNETRON-SPUTTERING DEPOSITION; NANO-COLUMNS; NANOCOLUMN; NITROGEN-DOPED; PYROLYTIC CARBON; SHEET STRUCTURE; SILICON SUBSTRATES; SLENDERNESS RATIOS; STEP-EDGE; TURN-ON FIELD;

FIELD EMISSION; GRAPHITE; MAGNETRONS; NICKEL; NICKEL ALLOYS; NITRIDES;

CARBON FILMS;

EID: 70149120478     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/18/185304     Document Type: Article

References (40)

1. Wang J J, Zhu M Y, Outlaw R A, Zhao X, Manos D M and Holloway B C 2004 Carbon 42 2867
2. Ruoff R S, Lorents D C, Chan B, Malhotra R and Subramoney S 1993 Science 259 346
3. Palnichenko A V, Mtéfi-Tempfli M, Issi J-P, Piraux L and Charlier J-C 2004 Carbon 42 1879
4. Hellgren N, Johansson M P, Broitman E, Hultman L and Sundgren J-E 1999 Phys. Rev. B 59 5162
5. Scalese S, Scuderi V, Simone F and Pennisi A 2006 Carbon 44 3123
6. Colgan M J and Brett M J 2001 Thin Solid Films 389 1
7. Fan S, Chapline M G, Franklin N R, Tombler T W, Cassell A M and Dai H 1999 Science 283 512
8. Dedkov Y S, Fonin M, Rüdiger U and Laubschat C 2008 Appl. Phys. Lett. 93 022509
9. Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J-H, Kim P, Choi J-Y and Hong B H 2009 Nature 457 706
10. Sjöström H, Stafström S, Boman M and Sundgren J-E 1995 Phys. Rev. Lett. 75 1336
11. Lee K-Y, Ikuno T, Tsuji K, Ohkura S, Honda S, Katayama M and Oura K 2003 J. Vac. Sci. Technol. B 21 1437
12. Lazar G, Bouchet-Fabre B, Zellama K, Clin M, Ballutaud D and Godet C 2008 J. Appl. Phys. 104 073534
13. Bouchet-Fabre B, Lazar G, Ballutaud D, Godet C and Zellama K 2008 Diamond Relat. Mater. 17 700
14. Camero M, Buijnsters J G, Gómez-Aleixandre C, Gago R, Caretti I and Jiménez I 2007 J. Appl. Phys. 101 063515
15. Alvarez F, Victoria N M, Hammer P, Freire F L Jr and dos Santos M C 1998 Appl. Phys. Lett. 73 1065
16. McCann R, Roy S S, Papakonstantinou P, Bain M F, Gamble H S and McLaughlin J A 2005 Thin Solid Films 482 34
17. Hammer P, Lacerda R G, Droppa R Jr and Alvarez F 2000 Diamond Relat. Mater. 9 577
18. Shi J R, Xu Y J and Zhang J 2005 Thin Solid Films 483 169
19. Haerle R, Riedo E, Pasquarelo A and Baldereschi A 2001 Phys. Rev. B 65 045101
20. Normand F L, Hommet J, Szorényi T, Fuchs C and Fogarassy E 2001 Phys. Rev. B 64 235416
21. Ferrari A C, Rodil S E and Robertson J 2003 Phys. Rev. B 67 155306
22. Abrasonis G, Gago R, Vinnichenko M, Kreissig U, Kolitsch A and Moller W 2006 Phys. Rev. B 73 12542
23. Banhart F, Charlier J-C and Ajayan P M 2002 Phys. Rev. Lett. 84 686
24. Bhattacharyya S, Cardinaud C and Turban G 1998 J. Appl. Phys. 83 4491
25. Bhattacharyya S, Cardinaud C and Turban G 1998 J. Appl. Phys. 83 3917
26. Roy D, Chhowalla M, Hellgren N and Amaratunga G A J 2004 Phys. Rev. B 70 035046
27. Rodil S E, Ferrari A C, Robertson J and Muhl S 2002 Thin Solid films 420 122
28. Victoria N M, Hammer P, dos Santos M C and Alvarez 2000 Phys. Rev. B 61 1083
29. Fanchini G, Tagliaferro A, Messina G, Santangelo S, Paoletti A and Tucciarone A 2002 J. Appl. Phys. 91 1155
30. Shin Y-H and Hong S Y 2008 Appl. Phys. Lett. 92 043103
31. Helveg S, López-Cartes C, Sehested J, Hansen P L, Clausen B S, Rostrup-Nielsen J R, Abild-Pedersen F and Nørskov J K 2004 Nature 427 426
32. Hofmann S, Ducati C, Robertson J and Kleinsorge B 2003 Appl. Phys. Lett. 83 135
33. Hofmann S, Csanyi G, Ferrari A C, Payne M C and Robertson J 2005 Phys. Rev. Lett. 95 036101
34. Kukovitsky E F, L'vov S G, Sainov N A, Shustov V A and Chernozatonskii L A 2002 Chem. Phys. Lett. 355 497
35. Kim M S, Rodriguez N M and Baker R T K 1991 J. Catal. 131 60
36. Ding F, Rosén A and Bolton K 2004 J. Phys. Chem. 121 2775
37. Colli A, Hofmann S, Ferrari A C, Ducati C, Martelli F, Rubini S, Cabrini S and Franciosi A 2005 J. Appl. Phys. 86 153103
38. Ilie A, Ferrari A C, Yagi T, Rodil S E and Robertson J 2001 J. Appl. Phys. 90 2024
39. Carey J D, Forrest R D, Khan R U A and Silva S R P 2000 Appl. Phys. Lett. 77 2006
40. Ilie A, Ferrari A C, Yagi T and Robertson J 2000 Appl. Phys. Lett. 76 2627