SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 483, Issue 1-2, 2005, Pages 169-174

Study on amorphous carbon nitride film prepared by facing target sputtering

(3) Shi, J R a Xu, Y J a Zhang, J a

a DATA STORAGE INSTITUTE (Singapore)

Author keywords

Amorphous carbon nitride; Facing target sputtering; Raman scattering; X ray photoelectron spectroscopy (XPS)

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; DEPOSITION; GAS METERS; MORPHOLOGY; RAMAN SCATTERING; SURFACES; SYNTHESIS (CHEMICAL); TARGETS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON NITRIDE; FACING TARGET SPUTTERING; NITROGEN CONTENT; TARGET SPUTTERING;

THIN FILMS;

EID: 18844409589 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.01.019 Document Type: Article

Times cited : (36)

References (42)

1
- 20444373328
- A. Liu, and M.L. Cohen Science 245 1989 841
- (1989) Science , vol.245 , pp. 841
- Liu, A.¹ Cohen, M.L.²

2
- 0042059097
- A. Liu, and M.L. Cohen Phys. Rev., B 41 1990 10727
- (1990) Phys. Rev., B , vol.41 , pp. 10727
- Liu, A.¹ Cohen, M.L.²

3
- 24544461001
- K.M. Yu, M.L. Cohen, E.E. Haller, W.L. Hasen, A.Y. Liu, and I.C. Wu Phys. Rev., B 49 1994 5034
- (1994) Phys. Rev., B , vol.49 , pp. 5034
- Yu, K.M.¹ Cohen, M.L.² Haller, E.E.³ Hasen, W.L.⁴ Liu, A.Y.⁵ Wu, I.C.⁶

4
- 1542595244
- Y. Li, Z.B. Zhang, S.S. Xie, and G.Z. Yang Chem. Phys. Lett. 247 1995 253
- (1995) Chem. Phys. Lett. , vol.247 , pp. 253
- Li, Y.¹ Zhang, Z.B.² Xie, S.S.³ Yang, G.Z.⁴

5
- 21544456105
- F. Alvarez, N.M. Victoria, P. Hammer, F.L. Freire, and M.C. dos Santos Appl. Phys. Lett. 73 1998 1065
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1065
- Alvarez, F.¹ Victoria, N.M.² Hammer, P.³ Freire, F.L.⁴ Dos Santos, M.C.⁵

6
- 0000454396
- L.C. Chen, C.K. Chen, and S.L. Wei Appl. Phys. Lett. 72 1998 3449
- (1998) Appl. Phys. Lett. , vol.72 , pp. 3449
- Chen, L.C.¹ Chen, C.K.² Wei, S.L.³

7
- 21844509437
- A. Bousetta, M. Lu, and A. Bansaoula J. Vac. Sci. Technol., A, Vac. Surf. Films 13 1995 1639
- (1995) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.13 , pp. 1639
- Bousetta, A.¹ Lu, M.² Bansaoula, A.³

8
- 0027555170
- M. Ricci, M. Trinquecoste, F. Auguste, R. Canet, P. Delhaes, C. Guimon, G. Pfister-Guillouzo, B. Nysten, and J.P. Issi J. Mater. Res. 8 1993 480
- (1993) J. Mater. Res. , vol.8 , pp. 480
- Ricci, M.¹ Trinquecoste, M.² Auguste, F.³ Canet, R.⁴ Delhaes, P.⁵ Guimon, C.⁶ Pfister-Guillouzo, G.⁷ Nysten, B.⁸ Issi, J.P.⁹

9
- 0001289452
- D. Wu, H. Guo, Z. Zhang, X. Meng, and X. Fan Phys. Rev., B 56 1997 4949
- (1997) Phys. Rev., B , vol.56 , pp. 4949
- Wu, D.¹ Guo, H.² Zhang, Z.³ Meng, X.⁴ Fan, X.⁵

10
- 0001639929
- S.E. Rodil, W.I. Milne, and J. Robertson Appl. Phys. Lett. 77 2000 1458
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1458
- Rodil, S.E.¹ Milne, W.I.² Robertson, J.³

11
- 0029342628
- I. Gouzman, R. Brener, and A. Hoffman Surf. Sci. 331-333 1995 283
- (1995) Surf. Sci. , vol.331-333 , pp. 283
- Gouzman, I.¹ Brener, R.² Hoffman, A.³

12
- 0028513869
- Z.M. Ren, Y.C. Du, and Z.F. Ying Appl. Phys. Lett. 65 1994 1361
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1361
- Ren, Z.M.¹ Du, Y.C.² Ying, Z.F.³

13
- 0027626327
- C. Niu, Y.Z. Lu, and C.M. Lieber Science 261 1999 334
- (1999) Science , vol.261 , pp. 334
- Niu, C.¹ Lu, Y.Z.² Lieber, C.M.³

14
- 0032606771
- Y. Aoi, K. Ono, and E. Kamijo J. Appl. Phys. 86 1999 2318
- (1999) J. Appl. Phys. , vol.86 , pp. 2318
- Aoi, Y.¹ Ono, K.² Kamijo, E.³

15
- 0037011031
- J.R. Shi, and J.P. Wang Thin Solid Films 420-421C 2002 172
- (2002) Thin Solid Films , vol.420-421 C , pp. 172
- Shi, J.R.¹ Wang, J.P.²

16
- 0011934521
- K. Noda, T. Kawanabe, and M. Naoe J. Appl. Phys. 81 1997 5405
- (1997) J. Appl. Phys. , vol.81 , pp. 5405
- Noda, K.¹ Kawanabe, T.² Naoe, M.³

17
- 0026261177
- T. Kawanabe, J.G. Park, and M. Naoe IEEE Trans. Magn. 27 1991 5031
- (1991) IEEE Trans. Magn. , vol.27 , pp. 5031
- Kawanabe, T.¹ Park, J.G.² Naoe, M.³

18
- 0026119693
- S. Akiyama, S. Nakagawa, M. Naoe, and K. Takagi Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 134 1991 1305
- (1991) Mater. Sci. Eng., a Struct. Mater.: Prop. Microstruct. Process. , vol.134 , pp. 1305
- Akiyama, S.¹ Nakagawa, S.² Naoe, M.³ Takagi, K.⁴

19
- 0001650812
- E.Y. Jiang, D.C. Sun, C. Lin, M.B. Tian, H.L. Bai, and S. Liu Ming J. Appl. Phys. 78 1995 2596
- (1995) J. Appl. Phys. , vol.78 , pp. 2596
- Jiang, E.Y.¹ Sun, D.C.² Lin, C.³ Tian, M.B.⁴ Bai, H.L.⁵ Liu Ming, S.⁶

20
- 0027542134
- W.K. Lee, T. Machino, and T. Sugihara Thin Solid Films 224 1993 105
- (1993) Thin Solid Films , vol.224 , pp. 105
- Lee, W.K.¹ MacHino, T.² Sugihara, T.³

21
- 0002227979
- D.C. Sun, E.Y. Jiang, H. Liu Ming, and C. Lin J. Phys. D 28 1995 4
- (1995) J. Phys. D , vol.28 , pp. 4
- Sun, D.C.¹ Jiang, E.Y.² Liu Ming, H.³ Lin, C.⁴

22
- 0001524926
- G.E. Jellison, and F.A. Modine Appl. Phys. Lett. 69 1996 371
- (1996) Appl. Phys. Lett. , vol.69 , pp. 371
- Jellison, G.E.¹ Modine, F.A.²

23
- 0036495639
- N. Mubumbila, P.Y. Tessier, B. Angleraud, and G. Turban Surf. Coat. Technol. 151-152 2002 175
- (2002) Surf. Coat. Technol. , vol.151-152 , pp. 175
- Mubumbila, N.¹ Tessier, P.Y.² Angleraud, B.³ Turban, G.⁴

24
- 0038684518
- H.S. Jung, and H.H. Park Appl. Surf. Sci. 216 2003 149
- (2003) Appl. Surf. Sci. , vol.216 , pp. 149
- Jung, H.S.¹ Park, H.H.²

25
- 0036495639
- N. Mubumbila, P.Y. Tessier, B. Angleraud, and G. Turban Surf. Coat. Technol. 151-152 2002 175
- (2002) Surf. Coat. Technol. , vol.151-152 , pp. 175
- Mubumbila, N.¹ Tessier, P.Y.² Angleraud, B.³ Turban, G.⁴

26
- 4243261951
- J. Diaz, G. Paolicelli, S. Ferrer, and F. Comin Phys. Rev., B 54 1996 8604
- (1996) Phys. Rev., B , vol.54 , pp. 8604
- Diaz, J.¹ Paolicelli, G.² Ferrer, S.³ Comin, F.⁴

27
- 0035270109
- B. Angleraud, N. Mubumbila, P.Y. Tessier, V. Fernandez, and G. Turban Diamond Relat. Mater. 10 2001 1142
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1142
- Angleraud, B.¹ Mubumbila, N.² Tessier, P.Y.³ Fernandez, V.⁴ Turban, G.⁵

28
- 0035269357
- A. Laskarakis, S. Logothetidis, C. Charitidis, M. Gioti, Y. Panayiotatos, M. Handrea, and W. Kautek Diamond Relat. Mater. 10 2001 1179
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1179
- Laskarakis, A.¹ Logothetidis, S.² Charitidis, C.³ Gioti, M.⁴ Panayiotatos, Y.⁵ Handrea, M.⁶ Kautek, W.⁷

29
- 0035270017
- Y. Hayashi, K.M. Krishna, H. Ebisu, T. Soga, M. Umeno, and T. Jimbo Diamond Relat. Mater. 10 2001 1002
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1002
- Hayashi, Y.¹ Krishna, K.M.² Ebisu, H.³ Soga, T.⁴ Umeno, M.⁵ Jimbo, T.⁶

30
- 0000334054
- J. Wagner, M. Ramseiner, C. Wild, and P. Koidl Phys. Rev., B 40 1989 1817
- (1989) Phys. Rev., B , vol.40 , pp. 1817
- Wagner, J.¹ Ramseiner, M.² Wild, C.³ Koidl, P.⁴

31
- 0028513408
- M.A. Tamor, and W.C. Vassell J. Appl. Phys. 76 1994 3823
- (1994) J. Appl. Phys. , vol.76 , pp. 3823
- Tamor, M.A.¹ Vassell, W.C.²

32
- 0038208253
- A.C. Ferrari, S.E. Rodil, and J. Robertson Phys. Rev., B 67 2003 155306
- (2003) Phys. Rev., B , vol.67 , pp. 155306
- Ferrari, A.C.¹ Rodil, S.E.² Robertson, J.³

33
- 0032476326
- A.K.M.S. Chowdhury, D.C. Cameron, and M.S.J. Hashmi Thin Solid Films 332 1998 62
- (1998) Thin Solid Films , vol.332 , pp. 62
- Chowdhury, A.K.M.S.¹ Cameron, D.C.² Hashmi, M.S.J.³

34
- 4244176688
- C.A. Davis, S.R.P. Silva, K.M. Knowles, G.A.J. Amaratunga, and M.W. Stobbs Phys. Rev. Lett. 75 1995 4258
- (1995) Phys. Rev. Lett. , vol.75 , pp. 4258
- Davis, C.A.¹ Silva, S.R.P.² Knowles, K.M.³ Amaratunga, G.A.J.⁴ Stobbs, M.W.⁵

35
- 0001181304
- J. Schwan, S. Ulrich, V. Batori, H. Ehrhardt, and S.R.P. Silva J. Appl. Phys. 80 1996 440
- (1996) J. Appl. Phys. , vol.80 , pp. 440
- Schwan, J.¹ Ulrich, S.² Batori, V.³ Ehrhardt, H.⁴ Silva, S.R.P.⁵

36
- 0034188614
- J.R. Shi, X. Shi, Z. Sun, E. Liu, B.K. Tay, and S.P. Lau Thin Solid Films 366 2000 169
- (2000) Thin Solid Films , vol.366 , pp. 169
- Shi, J.R.¹ Shi, X.² Sun, Z.³ Liu, E.⁴ Tay, B.K.⁵ Lau, S.P.⁶

37
- 0001327570
- M. Chhowalla, A.C. Ferrari, J. Robertson, and G.A.J. Amaratunga Appl. Phys. Lett. 76 2000 1419
- (2000) Appl. Phys. Lett. , vol.76 , pp. 1419
- Chhowalla, M.¹ Ferrari, A.C.² Robertson, J.³ Amaratunga, G.A.J.⁴

38
- 0000136079
- J. Robertson Diamond Relat. Mater. 4 1995 297
- (1995) Diamond Relat. Mater. , vol.4 , pp. 297
- Robertson, J.¹

39
- 0034507391
- J.R. Shi, Z. Sun, X. Shi, S.P. Lau, B.K. Tay, and J. Pelzl Thin Solid Films 377-378 2000 269
- (2000) Thin Solid Films , vol.377-378 , pp. 269
- Shi, J.R.¹ Sun, Z.² Shi, X.³ Lau, S.P.⁴ Tay, B.K.⁵ Pelzl, J.⁶

40
- 0033079899
- E. Liu, X. Shi, L.K. Cheah, Y.H. Hu, H.S. Tan, J.R. Shi, and B.K. Tay Solid-State Electron. 43 1999 427
- (1999) Solid-State Electron. , vol.43 , pp. 427
- Liu, E.¹ Shi, X.² Cheah, L.K.³ Hu, Y.H.⁴ Tan, H.S.⁵ Shi, J.R.⁶ Tay, B.K.⁷

41
- 0032666348
- M.A. Monclus, D.C. Cameron, and A.K.M.S. Chowdhury Thin Solid Films 341 1999 94
- (1999) Thin Solid Films , vol.341 , pp. 94
- Monclus, M.A.¹ Cameron, D.C.² Chowdhury, A.K.M.S.³

42
- 0038130773
- D.C. Cameron Surf. Coat. Technol. 169/170 2003 245
- (2003) Surf. Coat. Technol. , vol.169-170 , pp. 245
- Cameron, D.C.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.