Influence of Si content on the structure and internal stress of the nanocomposite TiSiN coatings deposited by large area filtered arc deposition

Journal of Physics D: Applied Physics

Volumn 42, Issue 12, 2009, Pages

  Cheng, Y H ^a   Browne, T ^a   Heckerman, B ^a   Gannon, P ^b   Jiang, J C ^c   Meletis, E I ^c   Bowman, C ^d   Gorokhovsky, V ^d  

^a American Eagle Instruments Inc   (United States)

^b Montana State University   (United States)

^c UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

^d Arcomac Surface Engineering LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SI; BONDING STRUCTURE; CRYSTALLINE STRUCTURE; FILTERED ARC DEPOSITION; GRAIN SIZE; INTERNAL STRESS; NANO-SIZED TIN; PREFERRED ORIENTATIONS; SI CONTENT; SUBSTRATE CURVATURE; XPS; XRD;

CAVITY RESONATORS; COATINGS; GRAIN SIZE AND SHAPE; HARDENING; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; TARGETS; TITANIUM COMPOUNDS; TITANIUM NITRIDE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS SILICON;

EID: 70149114780     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/12/125415     Document Type: Article

References (30)

1. Veprek S and Veprek-Heijman M G J 2007 Surf. Coat. Technol. 201 6064
2. Veprek S, Niederhofer A, Moto K, Bolom T, Mannling H-D, Nesladek P, Dollinger G and Bergmaier A 2000 Surf. Coat. Technol. 133-134 152
3. Veprek S, Veprek-Heijman M G J, Karvankova P and Prochazka J 2005 Thin Solid Films 476 1
4. Ee Y C, Chen Z, Wang W D, Chi D Z, Xu S and Law S B 2005 Surf. Coat. Technol. 198 291
5. Li Z G, Wu Y X and Miyake S 2007 J. Vac. Sci. Technol. A 25 1524
6. Guo C T, Lee D and Chen P C 2008 Appl. Surf. Sci. 254 3130
7. Yang S M, Chang Y Y, Lin D Y, Wang D Y and Wu W 2008 Surf. Coat. Technol. 202 2176
8. Cheng Y H, Browne T and Heckerman B 2009 J. Vac. Sci. Technol. A 27 82
9. Chang C L, Lin C T, Tsai P C, Ho W Y, Liu W J and Wang D Y 2008 Surf. Coat. Technol. 202 5516
10. Gorokhovsky V I, Polistchook V P and Yartsev I M 1993 Surf. Coat. Technol. 61 101
11. Has Z, Mitura S and Gorokhovsky V 1991 Surf. Coat. Technol. 47 106
12. Gorokhovsky V I, Bhat D G and Bhattacharya R 2001 Surf. Coat. Technol. 140 215
13. Gorokhovsky V 2003 US Patent No 6,663,755 B2
14. Nose M, Deguchi Y, Mae T, Honbo E, Nagae T and Nogi K 2003 Surf. Coat. Technol. 174-175 261
15. Meng W J, Zhang X D, Shi B, Tittsworth R C, Rehn L E and Baldo P M 2002 J. Mater. Res. 17 2628
16. Martin P J and Bendavid A 2003 Surf. Coat. Technol. 163-164 245
17. Perez-Mariano J, Lau K-H, Sanjurjo A, Caro J, Casellas D and Colominas C 2006 Surf. Coat. Technol. 201 2217
18. Cheng Y H, Browne T, Heckman B, Jiang J C, Meletis E I, Bowman C and Gorokhovsky V 2008 J. Appl. Phys. 104 093502
19. Stoney G 1909 Proc. R. Soc. Lond. A 82 172
20. Boxman R L, Sanders D M, Martin P J and Lafferty J M 1995 Handbook of Vacuum Arc Science and Technology: Fundamentals and Applications (Park Ridge, NJ: Noyes)
21. Vesel A, Mozetic M, Kovac J and Zalar A 2006 Appl. Surf. Sci. 253 2941
22. Bertoti I 2002 Surf. Coat. Technol. 151-152 194
23. Guemmaz M, Moser A and Parlebas J C 2000 J. Electron Spectrosc. Relat. Phenom. 107 91
24. Cheng Y H and Tay B K 2003 J. Vac. Sci. Technol. 21 1609
25. Veprek S 1999 J. Vac. Sci. Technol. A 19 2401
26. Klug H P and Alexander L E 1974 X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials (New York: Wiley-Interscience)
27. Anders A 2002 Appl. Phys. Lett. 80 1100
28. Cheng Y H and Tay B K 2003 J. Cryst. Growth 252 257
29. Cheng Y H, Tay B K and Lau S P 2002 J. Vac. Sci. Technol. A 20 1270
30. Lughi V and Clarke D R 2006 Appl. Phys. Lett. 24 241911