Nanocomposite TiSiN coatings deposited by large area filtered arc deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 1, 2009, Pages 82-88

  Cheng, Y H ^a   Browne, T ^a   Heckerman, B ^a  

^a American Eagle Instruments Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; COATINGS; ELECTRODEPOSITION; GRAIN SIZE AND SHAPE; HARDNESS; MECHANICAL PROPERTIES; NANOCOMPOSITES; PHOTOELECTRON SPECTROSCOPY; PLASMA DENSITY; PLASMAS; SCANNING ELECTRON MICROSCOPY; SILICON ALLOYS; SURFACE STRUCTURE; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; X RAY ANALYSIS; X RAY DIFFRACTION ANALYSIS;

ATOMIC RATIOS; BONDING STRUCTURES; CRYSTALLINE STRUCTURES; DEPOSITED COATINGS; FILTERED ARC DEPOSITIONS; FILTERED CATHODIC ARC PLASMAS; GRAIN SIZES; ION ENERGIES; LOW TEMPERATURES; N2 PARTIAL PRESSURES; NANOSIZED; PREFERRED ORIENTATIONS; TISI ALLOYS; TISI-N COATINGS; X-RAY DIFFRACTIONS; X-RAY PHOTOELECTRON SPECTROSCOPIES; YOUNG'S MODULUS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 58149512539     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3043460     Document Type: Article

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